Flexural Piezoelectric Resonators

Horsley, David A.; Lu, Yahai; Rozen, Ofer

doi:10.1007/978-3-319-28688-4_6

Cited by 21 publications

(23 citation statements)

References 20 publications

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“…Second, for a multielement ring array, the resonance frequency is fixed by the individual PMUTs, defined by Equation (3) for the first flexural mode considering square PMUTs [ 20 ].

…”

Section: Methodsmentioning

confidence: 99%

“…Second, for a multielement ring array, the resonance frequency is fixed by the individual PMUTs, defined by Equation (3) for the first flexural mode considering square PMUTs [20]. Using (2) and (3), the ratio fs/fa for the same layer stack is given by Equation (4) and computed in Figure 1 for different d/D ratios considering clamped boundaries where the parameter λij_annular 2 has been extracted from Tables 1 and 2 in [19].…”

Section: Multielement Ring Array Designmentioning

confidence: 99%

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Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth

Ledesma

Zamora

Uranga

et al. 2021

Sensors

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This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabricated by a monolithic process over CMOS, allowing for a very compact and robust design. Crosstalk between rings is under 56 dB, which guarantees an efficient beam focusing on a range between 1.4 mm and 67 µm. The presented PMUT-on-CMOS annular array with an overall diameter down to 669 µm achieves an output pressure in liquid of 4.84 kPa/V/mm2 at 1.5 mm away from the array when the five channels are excited together, which is the largest reported for PMUTs. Pulse-echo experiments towards high-resolution imaging are demonstrated using the central ring as a receiver. With an equivalent diameter of 149 µm, this central ring provides high receiving sensitivity, 441.6 nV/Pa, higher than that of commercial hydrophones with equivalent size. A 1D ultrasound image using two channels is demonstrated, with maximum received signals of 7 mVpp when a nonintegrated amplifier is used, demonstrating the ultrasound imaging capabilities.

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“…Second, for a multielement ring array, the resonance frequency is fixed by the individual PMUTs, defined by Equation (3) for the first flexural mode considering square PMUTs [ 20 ].

…”

Section: Methodsmentioning

confidence: 99%

Section: Multielement Ring Array Designmentioning

confidence: 99%

Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth

Ledesma

Zamora

Uranga

et al. 2021

Sensors

View full text Add to dashboard Cite

show abstract

“…Higher acoustic pressure output is required to achieve larger imaging depth and detection ranges for medical imaging and range-finding applications. The acoustic pressure output can be related to the axial pressure amplitude P ( z ) at a distance z from the transducer, given by Equation (13) [ 35 , 64 ].

…”

Section: Pmut Performance Metrics and Critical Design Parametersmentioning

confidence: 99%

“…According to Equation (13), acoustic pressure output scales with membrane displacement. For high acoustic pressure transfer, the PMUT membrane should exhibit large displacement [ 64 ].…”

Section: Pmut Performance Metrics and Critical Design Parametersmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

Birjis

Swaminathan

Nazemi

et al. 2022

Sensors

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With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.

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“…The reduction in the output resonant peak is further compounded for high dielectric constant fluids like water, which significantly increases the direct parasitic feedthrough between the input and output port of the MEMS resonator. Hence although capacitive MEMS resonators have been explored for liquid-phase sensing [10][11][12], thin-film piezoelectric MEMS resonators [13][14][15][16][17][18][19][20][21][22][23][24] have been receiving growing interest more recently as they offer superior electromechanical coupling efficiency than the former. The higher electromechanical coupling efficiency helps buffer the reduction in signal output typical of MEMS resonators electrically characterized in liquids and desirably lowers the motional resistance (R m ).…”

Section: Microelectromechanical (Mems) Resonators Have Been Onmentioning

confidence: 99%

Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

Begum¹,

Qian²,

Lee³

2021

J. Micromech. Microeng.

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This paper investigates the characteristics of higher-order transverse mode fully clamped membrane resonators that are piezoelectrically transduced as a class of resonators that completely seal the domain above the resonator from the domain below. Such isolation between the top and bottom of a resonator is preferable when encasing the device in a microfluidic cell for liquid-phase sensing measurements, a setup that can be beneficial for sensing applications. Most fully clamped membrane resonators are hampered by low liquid-phase quality factor (Q) and large motional resistance (R m). This paper describes the design of higher-order transverse (2, 2) mode square membrane and (2, 0) mode circular membrane resonators, and the effect of device scaling on liquid-phase Q and R m. We show a best-case liquid-phase R m of 54 kΩ and Q of 270 among the various membrane sizes tested. This level of liquid-phase Q is higher than some contour mode resonators. Compared to other fully clamped membrane resonators in the literature, the results here represent a significant improvement in both R m and Q, highlighting the potential of these membrane resonators for liquid-phase mass sensing applications.

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Flexural Piezoelectric Resonators

Cited by 21 publications

References 20 publications

Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth

Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications

Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

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