2019
DOI: 10.1088/1361-6439/ab1fc1
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Flexible printed circuit board magnetic micromirror for laser marking/engraving

Abstract: Recently, there is increasing interest in laser marking/ engraving of consumer goods, such as jewelry, nameplates, wallets and belts, cell phone cases, clothing, etc. These applications need a small laser working area (1-2 inches on each

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Cited by 24 publications
(30 citation statements)
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“…However, the second type needs to bond the mirror plate onto a released and fragile micro actuator, which is very difficult and then leads to a low bonding yield due to the low strain limit of the silicon flexible structure. In order to overcome this problem, flexible printed circuit board (FPCB) micromirrors were proposed and developed in [23,24,25,26] by the authors of the present paper, which have the mirror plate bonded to the FPCB structure. The flexible parts of FPCB structure are the polyimide layer or polyimide plus copper film laminate layer, which has a higher strain limit than silicon.…”
Section: Introductionmentioning
confidence: 99%
“…However, the second type needs to bond the mirror plate onto a released and fragile micro actuator, which is very difficult and then leads to a low bonding yield due to the low strain limit of the silicon flexible structure. In order to overcome this problem, flexible printed circuit board (FPCB) micromirrors were proposed and developed in [23,24,25,26] by the authors of the present paper, which have the mirror plate bonded to the FPCB structure. The flexible parts of FPCB structure are the polyimide layer or polyimide plus copper film laminate layer, which has a higher strain limit than silicon.…”
Section: Introductionmentioning
confidence: 99%
“…The compensation micromirror rotates the angle of the same magnitude and same direction of the translation micromirror's tilt. In the experiment, a translation micromirror, 6 a 1D Lorenz force magnetic rotation micromirror, 36 and a reflecting mirror form the compensation system. And its performance in a Michelson interferometer is tested.…”
Section: Resultsmentioning
confidence: 99%
“…The compensation system includes a one-dimensional (1D) compensation micromirror M2 36 and a reflecting mirror M3 to correct the tilt of the translation mirror M1. The tilting of M1 follows a constant and fixed manner, that is, tilting about one fixed axis, and the tilt versus the translation/driving current has a constant/fixed relation which can be calibrated.…”
Section: Working Principlementioning
confidence: 99%
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