Abstract:A tilt compensation system is presented in this article to compensate the tilt in the translation micromirror used in miniaturized Fourier transform infrared spectrometers. This compensation system can not only be used for the micromirror tested in this article but also be applicable to any translation micromirror with undesired tilt about one fixed axis. The compensation system consists of only a compensation micromirror and a reflecting mirror. The compensation micromirror rotates an angle of the same magnit… Show more
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