2021
DOI: 10.1002/nano.202100003
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Flexible pressure sensors with microstructures

Abstract: Microstructured flexible pressure sensors featured with good mechanical properties, boosting a variety of sophisticated application scenarios, including electronic skin (e-skin), soft robotics, wearable electronics, etc. This review is very focusing on the recent research progress of microstructured flexible pressure sensors. For better understanding the corresponding devices, different mechanisms, materials, preparation methods are briefly introduced at the beginning. And with highlighting the significance of… Show more

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Cited by 27 publications
(13 citation statements)
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References 279 publications
(424 reference statements)
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“…41 In addition, the high compressibility of the micropatterned active layer helps to increase the pressure sensing range of the sensor. 36,81,82 Several researchers have introduced porous structures into a material to effectively reduce the modulus of the material. 36 In contrast to the micro-patterned structure that is usually built on the surface of the active layer, the porous structure provides a rich porous network inside the active layer.…”
Section: Traditional Microstructuresmentioning
confidence: 99%
See 2 more Smart Citations
“…41 In addition, the high compressibility of the micropatterned active layer helps to increase the pressure sensing range of the sensor. 36,81,82 Several researchers have introduced porous structures into a material to effectively reduce the modulus of the material. 36 In contrast to the micro-patterned structure that is usually built on the surface of the active layer, the porous structure provides a rich porous network inside the active layer.…”
Section: Traditional Microstructuresmentioning
confidence: 99%
“…36,81,82 Several researchers have introduced porous structures into a material to effectively reduce the modulus of the material. 36 In contrast to the micro-patterned structure that is usually built on the surface of the active layer, the porous structure provides a rich porous network inside the active layer. It allows the sensor to deform effectively even under slight pressure, giving the sensor the advantages of high sensitivity, short response time, and low hysteresis.…”
Section: Traditional Microstructuresmentioning
confidence: 99%
See 1 more Smart Citation
“…The purpose of a flexible substrate is to safeguard flexible, conformal contact connecting human bodies to the electronics and should be capable of long-term reliability. The most commonly used substrate materials are elastomers, self-healing materials, hydrogels, and UV cross-linkable materials. , Flexible polymeric materials such as polydimethylsiloxane (PDMS), polyesters (polyethylene terephthalate (PET) and polyethylene napthalate (PEN)), polyurethane (PU), polyether sulfone (PES), poly­(ether ether ketone) (PEEK) and polyimide (PI), silicones (Ecoflex rubber), rubbers, and some natural materials (Cellulose) are favorable candidates to be used as substrates in flexible devices. PDMS has been used as the most common flexible substrate material in wearable electronic devices due to its inherent transparency and impressive stretchability.…”
Section: Components Sensing Mechanism Fabrication Process and Operati...mentioning
confidence: 99%
“…This scheme is based on the equivalent medium theory. Applying this concept to 2D metasurfaces, Tang et al [ 23 ] proposed encoding metasurfaces to simplify the design of metasurfaces. Coded metasurfaces can be used to achieve transmission and reflection beamforming, radar cross section reduction, phase gradient surfaces, invisibility cloaks, and absorbers.…”
Section: Related Workmentioning
confidence: 99%