2011
DOI: 10.7567/jjap.50.06gm09
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Flexible Polyimide Micropump Fabricated Using Hot Embossing

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Cited by 20 publications
(10 citation statements)
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“…The geometrical parameters in the nozzle‐diffuser such as the divergence angle ( ϴ = 10°) and throat width ratio ( w 2 / w 1 = 3.8) were considered to minimize the back draw flow and maximize the forward flow (Figure 3b). [ 32 ] Furthermore, the inlet sides of each nozzle‐diffuser model were designed with a rounded shape to reduce the forward flow resistance (Figure 3b, inset). Instead of using the conventional wafer‐based lithography, an additive 3D printing technique was adopted to print a positive master mold to demonstrate the concept of realizing a low‐cost and scalable microfluidic device (Figure 3c).…”
Section: Resultsmentioning
confidence: 99%
“…The geometrical parameters in the nozzle‐diffuser such as the divergence angle ( ϴ = 10°) and throat width ratio ( w 2 / w 1 = 3.8) were considered to minimize the back draw flow and maximize the forward flow (Figure 3b). [ 32 ] Furthermore, the inlet sides of each nozzle‐diffuser model were designed with a rounded shape to reduce the forward flow resistance (Figure 3b, inset). Instead of using the conventional wafer‐based lithography, an additive 3D printing technique was adopted to print a positive master mold to demonstrate the concept of realizing a low‐cost and scalable microfluidic device (Figure 3c).…”
Section: Resultsmentioning
confidence: 99%
“…PI has superior heat resistance, mechanical strength, and chemical stability. Therefore, PI is expected to withstand the high temperature of sterilization processing, and it is possible to transfer microstructures by hot embossing suitable for MEMS fabrication processes [4]. However, conventional PI is not transparent with a thick tan color, which makes it difficult to observe cultured biological cells on PI sheets.…”
Section: Introductionmentioning
confidence: 99%
“…42) Therefore, a power source with an area of cm 2 order, equivalent to the area of a current cardiac pacemaker, must exhibit a power density of 10 µW=cm 2 in an aqueous an AA solution with an AA concentration between 23 and 85 µM. Mogi et al 43) reported the fabrication and characterization of a miniaturized AAFC with a microchannel fabricated on a PI substrate using thermal nanoimprinting techniques [44][45][46][47] and MEMS technologies. However, they utilized porous carbon electrodes deposited on a flexible PI film, and these electrodes cracked after repeated bending of the BFC.…”
Section: Introductionmentioning
confidence: 99%