Flexible Piezoelectric Micromachined Ultrasonic Transducers Towards New Applications

Sun, Sheng; Zhang, Menglun; Gao, Chuanhai; Liu, Bohua

doi:10.1109/ultsym.2018.8580227

Cited by 16 publications

(10 citation statements)

References 7 publications

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“…Due to this assembly and method of fabrication, these kinds of speakers suffer from high cost and large size and weight. MEMS AlN thin films are used in more devices in the last five years such as piezoelectric micromachined ultrasonic transducers (PMUT) [11], [12], RF resonators [13], and MEMS microphones. [14][15] [16] All previous applications depend on AlN thin film for the unique features of AlN than other piezoelectric materials such as CMOS compatibility, quality of sputtered films is very high, and free lead piezoelectric material.…”

Section: Introductionmentioning

confidence: 99%

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Fawzy

2022

JES. Journal of Engineering Sciences

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This paper reports piezoelectric aluminium nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of micro speakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in-ear applications. We introduce the principle, design, and characterization results. The speakers were fabricated on cavity silicon on insulator (SOI) substrate and characterized by using an electroacoustic tester. This paper considers the acoustic performance of the speakers. The results show that the speakers gave us a high sound pressure level (SPL) of more than 78 dB for circle geometry when applying 2 volts on the electrodes. These results are equal for PZT MEMS speakers moreover AlN opens the door to integrate the speakers and the ASIC on the same chip. The size of the different geometries' speakers isn't exceeded 3mm × 3mm. These geometries offer a breakthrough in acoustic performance, a frequency response, and low power consumption

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Section: Introductionmentioning

confidence: 99%

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Fawzy

2022

JES. Journal of Engineering Sciences

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“…Scandium aluminium nitride (Sc x Al 1−x N) is a better choice because (Sc x Al 1−x N) retains many features of AlN (e.g. CMOS compatibility, ease of deposition/etching) but possesses significantly increased piezoelectric properties compared with AlN [7][8][9][10]. However, most of the devices published to date have used PZT.…”

Section: Introductionmentioning

confidence: 99%

“…MEMS loudspeakers are widely used in smartphones, in-ear applications, head phones, or other consumer goods [1][2][3][4][5] In recent years, lead zirconium titanate (PZT) piezoelectric micro speakers are dominant on the research trend. Aluminium nitride (AlN) can be another way where AlN has ≈10× lower transmitting efficiency compared with PZT [6,7]. Scandium aluminium nitride (Sc x Al 1−x N) is a better choice because (Sc x Al 1−x N) retains many features of AlN (e.g.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Fawzy

Lang

Zhang

2021

Micro & Nano Letters

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“…The transfer printing technique, by contrast, is considered to be a better option to fabricate flexible thin-film ultrasonic transducers. The devices are fabricated on a rigid silicon donor substrate firstly and then transferred onto a receiver substrate using an elastic stamp [28]. In this technique, the control of the interfacial adhesion force between the stamp and the structure is critical to the success of the transfer printing process [29,30].…”

Section: Introductionmentioning

confidence: 99%

Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer

Liu

2020

Sensors

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This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate. A low temperature (<100 °C) adhesive bonding technique is adopted in the fabrication process. Finite element analysis (FEA) is implemented to confirm the capability of predicting the resonant frequency of composite diaphragms and optimizing the device. The manufactured PMUT exhibits a center frequency of 198 kHz with a wide operational bandwidth. Its acoustic performance is demonstrated by transmitting and receiving ultrasound in air on curved surface. The conclusions from this study indicate the proposed PMUT has great potential in ultrasonic and wearable devices applications.

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Flexible Piezoelectric Micromachined Ultrasonic Transducers Towards New Applications

Cited by 16 publications

References 7 publications

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer

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