Flexible Magnetic Writing / Reading System: Polyimide Film as Flexible Substrate

Taptimthong, Piriya; Rittinger, J.; Wurz, Marc Christopher; Rissing, Lutz

doi:10.1016/j.protcy.2014.09.076

Cited by 17 publications

(7 citation statements)

References 4 publications

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“…Flexible thin films are already firmly established in the form of flexible solar cells [27], flexible displays [28] and flexible medical or gas monitoring sensors [29][30][31]. Recently there have been a number of studies of magnetic flexible thin films and their properties [32,33], in which the flexibility was achieved by depositing magnetic thin films onto flexible substrates. Magnetic properties, such as anisotropy or coercive field, often exhibit unusual characteristics in thin films compared to that of a bulk material [34].…”

Section: Introductionmentioning

confidence: 99%

Evidence of substrate roughness surface induced magnetic anisotropy in Ni80Fe20 flexible thin films

Belusky

Lepadatu

Naylor

et al. 2019

Journal of Magnetism and Magnetic Materials

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Experimental and computational evidence of a surface roughness induced magnetic anisotropy in NiFe thin films coated onto substrates of various surface roughnesses is reported. Magnetic coercive fields of 15 nm NiFe thin films coated on substrates with approximately 7 nm average roughness were remarkably 233% larger than identical thin films coated onto smooth substrates with < 1 nm average roughness. The NiFe films coated onto rough substrates developed hard and easy axes, normally non-existent in NiFe Permalloy. A linear correlation of the incline angles of the hard axis hysteresis loops to the average roughness values of the individual substrates was observed, with 99% correlation level. Using a modified micromagnetics theory that incorporates the effects of surface roughness, it is shown the observed magnetic anisotropy arises due to the spatial anisotropy of the surface roughness, resulting in an effective in-plane uniaxial magnetic anisotropy with energy density up to 15 kJ/m 3 .

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Section: Introductionmentioning

confidence: 99%

Evidence of substrate roughness surface induced magnetic anisotropy in Ni80Fe20 flexible thin films

Belusky

Lepadatu

Naylor

et al. 2019

Journal of Magnetism and Magnetic Materials

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“…DFPs represent already a central component in the shown DFP-based microfluidic channel assembly, but there is still the need for a channel carrier substrate like silicon, glass and polymeric foils, such as polyimide [49,50]. Therefore, the question arises whether or not these carrier substrates can be exchanged by patterned DFPs.…”

Section: Multilayer Dfps For Microfluidic Channelsmentioning

confidence: 99%

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Roos

Winkler

Nilsen

et al. 2021

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP.

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“…As flexible substrate, Kapton ® foil was used due to its outstanding physical properties [ 65 ]. Subsequent to preliminary works [ 66 ], multi-layer structures such as the soft magnetic head poles and the MR element have been fabricated on the Kapton ® polyimide film ( Figure 11 ).…”

Section: Current Developmentsmentioning

confidence: 99%

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Jogschies

Klaas

Kruppe

et al. 2015

Sensors

230

113

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The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling).

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Flexible Magnetic Writing / Reading System: Polyimide Film as Flexible Substrate

Cited by 17 publications

References 4 publications

Evidence of substrate roughness surface induced magnetic anisotropy in Ni80Fe20 flexible thin films

Evidence of substrate roughness surface induced magnetic anisotropy in Ni80Fe20 flexible thin films

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Recent Developments of Magnetoresistive Sensors for Industrial Applications

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