Flexible M-Tooth Hybrid Micro-Structure-Based Capacitive Pressure Sensor With High Sensitivity and Wide Sensing Range

Palaniappan, V.; Panahi, Masoud Shariat; Maddipatla, Dinesh; Zhang, X.; Masihi, S.; Emani, H. R. K. M.; Narakathu, Binu B.; Bazuin, Bradley J.; Atashbar, Massood Z.

doi:10.1109/jsen.2021.3064451

Cited by 28 publications

(10 citation statements)

References 59 publications

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“…These results demonstrate the superiority of the VG electrodes and micro-pyramidal dielectrics. In addition, when compared with the results in the literature, the pyramid structure of the dielectric layer is superior to other geometries, as shown in Table S5 [ 43 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 ].…”

Section: Resultsmentioning

confidence: 81%

“…The following supporting information can be downloaded at: , Figure S1: Height distribution ratios of the VG1, VG2, and VG3 films analyzed using Image J software; Figure S2: Sheet resistance of the VG1, VG2, and VG3 films; Figure S3: Step response of the VG1-F sensor at the pressure of 0–1 kPa; Figure S4: Illustration of the size and interval of the micro-pyramids in the PDMS dielectric layer; Figure S5: Relative capacitance changes of the VG1-based capacitive pressure sensors with different micro-pyramid sizes and intervals at a pressure range of 0–10 kPa; Table S1: Growth conditions of the VG films with different morphologies; Table S2: Comparison of the sensitivities of the VG1-F, VG2-F, and VG3-F sensors; Table S3: Comparison of the sensitivities of the VG-based sensors with different micro-pyramid sizes and intervals; Table S4: Comparison of the sensitivities of the VG-based sensors and graphite paper-based sensors with/without micro-pyramidal PDMS dielectric layer; Table S5: Comparison of the performances of the pyramid structured interfaces with other reported geometries. References [ 43 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 ] are cited in the supplementary materials. Table S6: Comparison of the performances of the VG based sensor with other pressure sensors in the literature.…”

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confidence: 99%

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Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer

Zhao

Han

et al. 2023

Nanomaterials

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Many practical applications require flexible high-sensitivity pressure sensors. However, such sensors are difficult to achieve using conventional materials. Engineering the morphology of the electrodes and the topography of the dielectrics has been demonstrated to be effective in boosting the sensing performance of capacitive pressure sensors. In this study, a flexible capacitive pressure sensor with high sensitivity was fabricated by using three-dimensional vertical graphene (VG) as the electrode and micro-pyramidal polydimethylsiloxane (PDMS) as the dielectric layer. The engineering of the VG morphology, size, and interval of the micro-pyramids in the PDMS dielectric layer significantly boosted the sensor sensitivity. As a result, the sensors demonstrated an exceptional sensitivity of up to 6.04 kPa−1 in the pressure range of 0–1 kPa, and 0.69 kPa−1 under 1–10 kPa. Finite element analysis revealed that the micro-pyramid structure in the dielectric layer generated a significant deformation effect under pressure, thereby ameliorating the sensing properties. Finally, the sensor was used to monitor finger joint movement, knee motion, facial expression, and pressure distribution. The results indicate that the sensor exhibits great potential in various applications, including human motion detection and human-machine interaction.

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Section: Resultsmentioning

confidence: 81%

mentioning

confidence: 99%

Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer

Zhao

Han

et al. 2023

Nanomaterials

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“…It can be seen that the times vary slightly with the addition of PMMA at different mass ratios. Firstly, considering the reasons that affect their performance, the viscoelastic nature of elastomers prevents long response times and obtaining high sensitivity values [61]. Secondly, the performance of the electromechanical device affects the response and relaxation times when the pressure is applied to the sample, and it cannot fully load and unload the pressure [62].…”

Section: Pressure Sensing Capacitance Performancementioning

confidence: 99%

Flexible capacitive and piezoresistive pressure sensors based on screen-printed parylene C/polyurethane composites in low-pressure range

Kurnaz,

Ozturk,

Mehmet

et al. 2023

Flex. Print. Electron.

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The use of polymers to fabricate flexible pressure sensors as an alternative to conventional pressure sensors has led to the development of physiological monitoring of human body and the electronic skin. In particular, the fabrication of flexible capacitive and piezoresistive sensors using a variety of materials and the investigation of their electromechanical properties are further developments in these fields. Herein, parylene C is synthesized via chemical vapor deposition method. Pressure-sensitive inks are prepared with a composite of parylene C, polyurethane, polymethylmethacrylate, and activated carbon at certain weight ratios. Flexible capacitive and piezoresistive pressure sensors are fabricated by the screen printing method. The sensitivity, detection limit, linearity range, and response/relaxation time, which define the capacitive and piezoresistive properties are investigated and presented in this paper. The sensitivities of the flexible capacitive and piezoresistive pressure sensors are 0.124 kPa−1 and 0.074 kPa−1 in the pressure range of 0.07–1.39 kPa. This study enables parylene C to be used in the composite structure and shows that it can be used not only as a protective layer but also in flexible pressure sensor applications. It also ensures that the design of the flexible capacitance pressure sensor can measure low pressure with high sensitivity compared to the flexible piezoresistive pressure sensor.

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“…[15] Zhu et al fabricated a piezoresistive sensor using synthetic aerogel of MXene and graphene with a sensitivity of up to 609 kPa(−1) in the range of 0-10 kPa and with a response time of 232 ms. [16] The microstructure of a flexible pressure sensor affects the contact-separation of the sensor. To effectively improve the performance of pressure sensors, a wide variety of microstructures (e.g., spyramidal, [17] dentate, [18] and biomimetic structures [19] ) have been developed through different ways, including photolithography, bionic design, and other methods. The use of porous structures with a relatively simple process can increase the sensor sensitivity and improve its mechanical properties; so, this method has been used to fabricate flexible sensors.…”

Section: Introductionmentioning

confidence: 99%

Flexible Pressure Sensors Based on MXene/PDMS Porous Films

Wang

Li³

et al. 2023

Adv Materials Technologies

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With the increasing demand for smart devices requires sensors with portability and wearability, high performance and durability,and low cost. In this work, an MXene/PDMS flexible self‐powered porous triboelectric pressure sensor (PTPS) is proposed based on the principles of triboelectrification and electrostatic induction. The film‐forming performance of the sensor is investigated for different MXene hydrosol mass ratios, and three modes of operation and practical performance of the PTPS are studied. The sensor converts the applied mechanical force into electrical signals, and the applied load in the range of 0.15–2.50 N and 2.50–5.15 N has a linear correlation with the output voltage. The obtained results show that the sensor sensitivity in these two ranges is 659.37 and 467.74 mV N−1, respectively. The response time of the proposed PTPS is less than 30 ms, and it can be applied to detect signals with a frequency up to 20 Hz. The voltage output remains stable after 6000 contact–separation test cycles. Moreover, hand gesture recognition, water drop sensing, mouse click, and keyboard press sensing are studied in wearable and non‐wearable scenarios. Based on the obtained results, it is concluded that the proposed PTPS has a promising performance in the field of self‐powered human motion sensing electronics.

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Flexible M-Tooth Hybrid Micro-Structure-Based Capacitive Pressure Sensor With High Sensitivity and Wide Sensing Range

Cited by 28 publications

References 59 publications

Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer

Highly Sensitive and Flexible Capacitive Pressure Sensors Based on Vertical Graphene and Micro-Pyramidal Dielectric Layer

Flexible capacitive and piezoresistive pressure sensors based on screen-printed parylene C/polyurethane composites in low-pressure range

Flexible Pressure Sensors Based on MXene/PDMS Porous Films

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