Many practical applications require flexible high-sensitivity pressure sensors. However, such sensors are difficult to achieve using conventional materials. Engineering the morphology of the electrodes and the topography of the dielectrics has been demonstrated to be effective in boosting the sensing performance of capacitive pressure sensors. In this study, a flexible capacitive pressure sensor with high sensitivity was fabricated by using three-dimensional vertical graphene (VG) as the electrode and micro-pyramidal polydimethylsiloxane (PDMS) as the dielectric layer. The engineering of the VG morphology, size, and interval of the micro-pyramids in the PDMS dielectric layer significantly boosted the sensor sensitivity. As a result, the sensors demonstrated an exceptional sensitivity of up to 6.04 kPa−1 in the pressure range of 0–1 kPa, and 0.69 kPa−1 under 1–10 kPa. Finite element analysis revealed that the micro-pyramid structure in the dielectric layer generated a significant deformation effect under pressure, thereby ameliorating the sensing properties. Finally, the sensor was used to monitor finger joint movement, knee motion, facial expression, and pressure distribution. The results indicate that the sensor exhibits great potential in various applications, including human motion detection and human-machine interaction.

Wearable sensors are vital for the development of electronic skins to improve health monitoring, robotic tactile sensing, and artificial intelligence. Active materials and the construction of microstructures in the sensitive layer are the dominating approaches to improve the performance of pressure sensors. However, it is still a challenge to simultaneously achieve a sensor with a high sensitivity and a wide detection range. In this work, using three-dimensional (3D) vertical graphene (VG) as an active material, in combination with micropyramid arrays and lumpy holders, the stress concentration effects are generated in nano-, micro-, and macroscales. Therefore, the lumpily pyramidal VG film-based pressure sensor (LPV sensor) achieves an ultrahigh sensitivity (131.36 kPa–1) and a wide response range (0.1–100 kPa). Finite element analysis demonstrates that the stress concentration effects are enhanced by the micropyramid arrays and lumpy structures in micro- and macroscales, respectively. Finally, the LPV pressure sensors are tested in practical applications, including wearable health monitoring and force feedback of robotic tactile sensing.