2018
DOI: 10.1002/smll.201703644
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Flexible Film Bulk Acoustic Wave Filters toward Radiofrequency Wireless Communication

Abstract: This paper presents a flexible radiofrequency filter with a central frequency of 2.4 GHz based on film bulk acoustic wave resonators (FBARs). The flexible filter consists of five air-gap type FBARs, each comprised of an aluminum nitride piezoelectric thin film sandwiched between two thin-film electrodes. By transfer printing the inorganic film structure from a silicon wafer to an ultrathin polyimide substrate, high electrical performance and mechanical flexibility are achieved. The filter has a peak insertion … Show more

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Cited by 34 publications
(36 citation statements)
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“…As seen in Table 1, the minimum insertion loss of the bandpass filter deteriorated by 0.01, 0.02, 0.02, and 0.02 dB separately after the bending, folding, rolling, and tape-exfoliation tests. The errors were mainly caused by the influence of testing environments and fabrication tolerance [20,21]. The frequency shift and the insertion loss degradation of the designed filters were negligible.…”
Section: Characteristicsmentioning
confidence: 99%
See 3 more Smart Citations
“…As seen in Table 1, the minimum insertion loss of the bandpass filter deteriorated by 0.01, 0.02, 0.02, and 0.02 dB separately after the bending, folding, rolling, and tape-exfoliation tests. The errors were mainly caused by the influence of testing environments and fabrication tolerance [20,21]. The frequency shift and the insertion loss degradation of the designed filters were negligible.…”
Section: Characteristicsmentioning
confidence: 99%
“…It can be seen that no crack or contamination occurred during the reduction process. The designed bandpass filter has a great potential to be integrated with other flexible electronic components [20]. This technique does not rely on costly equipment, and the adhesion of passive metals to the polymers is better.…”
Section: Fabrication Of the Filtermentioning
confidence: 99%
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“…Circuits: filter, reproduced with permission. [28] Copyright 2018, Wiley-VCH. Amplifier, reproduced under the terms of the Creative Commons Attribution 4.0 International License.…”
Section: Flexible Microwave Transistors Based On Conventional Semiconmentioning
confidence: 99%