Flexible Engineering Tool for Radiofrequency Parameter Identification of RF-MEMS BAW Filters

Abstract

In this paper, we present a new specific and customized interface tool with parameter identification of Modified Butterworth‐Van Dyke models for ladder bulk acoustic wave filters. The aforementioned tool is easy to use and flexible because it allows simulations and reengineering to be conducted in an application. A modular design approach is applied to simplify the extension of the proposed tool for different topologies. The proposed tool was validated using measurements from an aluminum‐nitride based ladder BAW filter dedicated to the frequency ranges of the Universal Mobile Telecommunications Service and standards and Wideband Code Division Multiple Access.

Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO3 Thin Film

“…It is worth mentioning that the equivalent electrical MBVD model is a behavioral model, which is only valid around the resonance frequency of a modeled resonator [59]. This means that it may have infinite configurations for the same response when not considering the physical properties of the individual resonator [60]. In order to ensure that the values of the MBVD fitting were within a reasonable range, we used a Keysight Technologies B1500A semiconductor analyzer device to measure the I-V curves of the pad and the routing connection.…”

Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

“…The radio frequency of a micro-electro-mechanical system (RF MEMS) tunable filter, which is a type of electronic component that controls signals by RF MEMS switches, and offers higher integration, lower power dissipation, smaller size, better linearity, and better performance in frequency adjustment than conventional filters [ 11 ]. Therefore, over the last two decades, RF MEMS filters have had tremendous applications in modern communications systems, such as satellite communication, radar, medical electronics, and software [ 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 ]. As an important electronic device in signal transceivers, the tunable filter, without noise or various unwanted signals in each frequency band, reduces inter-channel interference, ensures the normal operation of communication equipment, and achieves high-quality communication [ 22 ].…”