2018
DOI: 10.1134/s106373971803006x
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Finite Element Simulation of Frequency Response of MEMS-Microphone

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Cited by 3 publications
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“…We used MEMS (micro-electromechanical systems) microphones produced by Knowles 31 to create our microphone arrays. For a long time there has been a drive towards miniaturization in electronics 32 which can also be seen in the rise of MEMS sensors such as microphones 33 , 34 . The recent developments in MEMS microphones are an enabling piece of technology allowing the construction of affordable microphone arrays.…”
Section: Resultsmentioning
confidence: 99%
“…We used MEMS (micro-electromechanical systems) microphones produced by Knowles 31 to create our microphone arrays. For a long time there has been a drive towards miniaturization in electronics 32 which can also be seen in the rise of MEMS sensors such as microphones 33 , 34 . The recent developments in MEMS microphones are an enabling piece of technology allowing the construction of affordable microphone arrays.…”
Section: Resultsmentioning
confidence: 99%