Finite Element Modelling of a Piezoelectric Accelerometer for Apparent Acceleration Measurement

Gupalov, Valery I.; Kukaev, Alexander S.; Venediktov, Vladimir Yu.

doi:10.1145/3365245.3365259

Cited by 1 publication

(2 citation statements)

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“…The structure with the double groove can achieve 1.5 times the stress and sensitivity of the no groove and 4.5 times higher sensitivity compared to a regular piezoelectric cantilever structure resulting in acoustic sensitivity increase of 13 dB . Gupalov et al proposed a structure which can detect acceleration almost constantly by reducing the charge leakage; this device reported a sensitivity of 36 mV/ g …”

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

“…38 Gupalov et al proposed a structure which can detect acceleration almost constantly by reducing the charge leakage; this device reported a sensitivity of 36 mV/g. 39 Zhang and coauthors reported a piezoelectric six degrees of freedom (6-DOF) accelerometer with the ability to detect both linear and angular accelerations made of cylindrical inertial mass, eight piezoelectric quartz chips, pretightening bolt, and base to get better sensitivity characteristics. A simulation was done to study six degrees of freedom for nine variations of the dimensions of various parts of the device, and finally the optimum one was fabricated with height 25 mm and radius 29 mm.…”

Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 99%