Finite element modeling of a Ti based compact RF MEMS series switch design for harsh environment

Layered axial force coupled membrane based metal contact single-pole quad-throw RF MEMS switch: design, RF performance and mechanical modeling

“…The performance is simulated between input port (Port 1) and output ports (Port 2-4). The output signal can be taken from any port provided that whatever port is excited by bias voltage (Lee et al 2005;Singh 2015;Singh and Pashaie 2014;Singh and Rangra 2015) …”

“…Among the various RF MEMS devices like phase shifters, filters, tunable varactors or capacitors, switches and many more, RF MEMS switches have become the most integral part of any RF system and are vigorously pursued MEMS devices by many research communities. About the electrostatically actuated MEMS switches, that have proved their superior performance in terms of excellent RF performance including near-zero power consumption, very high isolation, negligible insertion loss, linearity and low intermodulation distortion in switching operations (Rebeiz 2004;Robin et al 2008;Singh 2013a;Singh and Pashaie 2014). But on the opposite side, they also have there share of problems.…”

“…R 1 and R 2 are reaction forceset al 2008;Simons 2004). It gives much more headroom for the stress gradient(Singh 2013a, b;Singh and Pashaie 2014;.…”

Modeling Method of Finite Element Modeler and Electromagnetic Solvers for Education and Research in RF MEMS

“…RF MEMS switches or subsystems are highly regarded for their better RF performance in microwave regime than their semiconductor counterparts. RF MEMS switches have huge advantage including; excellent isolation, low insertion loss, negligible power consumption, very compact structure, low cost of manufacturing [20]. But these tiny intelligent devices suffer from reliability issues including stiction and high voltage requirements [13], To overcome these problems, researchers and designers has to model and analyse the issues first and then optimise the design accordingly.…”

“…The design and modeling parameters are reported in [5], [20]. We have presented the stress analysis for two different membranes.…”