Finite element method as applied to the study of gratings embedded in complementary metal-oxide semiconductor image sensors

We propose a novel formulation of the finite element method adapted to the calculation of the vector field diffracted by an arbitrarily shaped crossed-grating embedded in a multilayered stack and illuminated by an arbitrarily polarized plane wave under oblique incidence. A complete energy balance (transmitted and reflected diffraction efficiencies and losses) is deduced from field maps. The accuracy of the proposed formulation has been tested using classical cases computed with independent methods. Moreover, to illustrate the independence of our method with respect to the shape of the diffractive object, we present the global energy balance resulting from the diffraction of a plane wave by a lossy thin torus crossed-grating. Finally, computation time and convergence as a function of the mesh refinement are discussed. As far as integrated energy values are concerned, the presented method shows a remarkable convergence even for coarse meshes.

show abstract

All-purpose finite element formulation for arbitrarily shaped crossed-gratings embedded in a multilayered stack

Demésy

Zolla

Nicolet

et al. 2010

J. Opt. Soc. Am. A

View full text Add to dashboard Cite

show abstract

Integration of nanostructured planar diffractive lenses dedicated to near infrared detection for CMOS image sensors

et al. 2016

View full text Add to dashboard Cite

This paper deals with the integration of metallic and dielectric nanostructured planar lenses into a pixel from a silicon based CMOS image sensor, for a monochromatic application at 1.064 μm. The first is a Plasmonic Lens, based on the phase delay through nanoslits, which has been found to be hardly compatible with current CMOS technology and exhibits a notable metallic absorption. The second is a dielectric Phase-Fresnel Lens integrated at the top of a pixel, it exhibits an Optical Efficiency (OE) improved by a few percent and an angle of view of 50°. The third one is a metallic diffractive lens integrated inside a pixel, which shows a better OE and an angle of view of 24°. The last two lenses exhibit a compatibility with a spectral band close to 1.064 μm.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Finite element method as applied to the study of gratings embedded in complementary metal-oxide semiconductor image sensors

Cited by 2 publications

References 18 publications

All-purpose finite element formulation for arbitrarily shaped crossed-gratings embedded in a multilayered stack

All-purpose finite element formulation for arbitrarily shaped crossed-gratings embedded in a multilayered stack

Integration of nanostructured planar diffractive lenses dedicated to near infrared detection for CMOS image sensors

Contact Info

Product

Resources

About