Micromachined fluid-filled variable impedance waveguides intended to mimic the mechanics of the passive mammalian cochlea have been fabricated and experimentally examined. The structures were microfabricated with dimensions similar to those of the biological system. Experimental tests demonstrate acoustically excited traveling fluid-structure waves with phase accumulations between 1.5 and 3 radians at the location of maximum response. The resulting measured frequency-position mapping function, with similarities to that observed in the cochlea, is presented. Results for both isotropic and orthotropic membranes are reported, demonstrating that the achieved orthotropy ratio of 8:1 in tension is insufficient to produce the sharp filtering observed in animal experiments and many computational models that use higher ratios. It is also shown experimentally that high viscosity fluids must be used to provide sufficient damping to avoid the formation of a nonphysiological standing wave pattern. A mathematical model incorporating a thin-layer viscous, compressible fluid approximation coupled to an orthotropic membrane model is validated against experimental results. The work presented herein is motivated by the possibility of producing microfabricated cochlear-like filters, thus the structure is designed for production in a scalable microfabrication process.acoustic ͉ micro-electro-mechanical systems ͉ sensor ͉ viscosity T he cochlea is the organ in the inner part of the mammalian ear that is responsible for the transduction of acoustic signals into neurological signals. The typical human cochlea operates over a 3-decade frequency band, from 20 Hz to 20 kHz, covers 120 dB of dynamic range, and can distinguish tones that differ by Ͻ0.5% (1). The cochlea is also very small, occupying a volume of Ϸ1 cm 3 . Perhaps most importantly, the cochlea uses a mechanical process to separate audio signals into Ϸ3,500 channels of frequency information. Thus, the cochlea is a sensitive real-time mechanical frequency analyzer.The effectiveness of the cochlea as a time-frequency analyzer motivates our efforts to construct a hydromechanical analog that can be fabricated repeatably and in a batch fashion. Integration of sensing elements with the mechanical structure would result in a combined acoustic sensor͞filter with a unique operating modality. During the design of the mechanical structure, we also learn more about some aspects of the biological cochlea. von Békésy's (2, 3) observation of traveling waves on the basilar membrane (BM) of cadaver cochleae motivated the construction of a number of physical models of the cochlea. The first group of these models involved scaled-up versions of the cochlea. Helle's (4) model is seven times life size and exhibits tonotopic structure in the 25-to 800-Hz band. Chadwick et al. (5) built a 24 times life-size model and clearly show strong standing wave patterns and the resulting discrete resonances. Because of the standing wave nature of their response, a tonotopic map is not demonstrated (5). Lechner'...