Fine purification of silane for removal of chlorosilanes by membrane gas separation

Воротынцев, В. М.; Дроздов, П. Н.; Воротынцев, И. В.; Manokhina, S. N.; Knysh, S. S.

doi:10.1134/s0965544113080161

Cited by 16 publications

(17 citation statements)

References 13 publications

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“…for a fast permeant impurity. In the dilute limit, use of (8) in (15) or (9) in (16) leads to the same result…”

Section: Binary Gas Mixture In the Dilute Limitmentioning

confidence: 65%

“…In addition, every effort needs to be made to reduce losses and priming volume in a batch system. In contrast to previous similar works [14][15][16], the present analysis provides closed formulae to estimate operating parameters to accomplish a particular separation. Specifically, the time of the operation, the membrane surface area, the gas pressure and temperature, the residual concentrations in all components including the rejected stream, the magnitude of the flows in the system, the effect of temperature and pressure, the optimization of model parameters, and the sensitivity of the model parameters to uncertainty.…”

Section: Introductionmentioning

confidence: 94%

“…This opens a new door for a post-synthesis membrane purification approach as compared to large-scale, industrial cryogenic distillation of natural silane [9]. In particular, gas separation membranes [7,15,16] have been studied for related applications but no detailed analytic bounds have been provided to guide the practical implementation of real processes.…”

Section: Introductionmentioning

confidence: 99%

“…Recent pertinent work [16] suggests that the permeability of silane (sec. 3), with typical impurities, in commercial polydimethylsiloxane (PDMS) allows for separation of impurities of interest.…”

Section: Introductionmentioning

confidence: 99%

“…We are left with making conjectures about the potential problem of separating methane from silane. The single data set at hand [16] indicates a problematic situation since solubility appears to be similar for both compounds and therefore potential poor separation ability. We were unable to find data on size-based separation membranes.…”

Section: Introductionmentioning

confidence: 99%

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Analysis of gas membrane ultra-high purification of small quantities of mono-isotopic silane

Almeida

Hart

2017

Journal of Membrane Science

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A small quantity of high-value, crude, mono-isotopic silane is a prospective gas for a small-scale, highrecovery, ultra-high membrane purification process. This is an unusual application of gas membrane separation for which we provide a comprehensive analysis of a simple purification model. The goal is to develop direct analytic expressions for estimating the feasibility and efficiency of the method, and guide process design; this is only possible for binary mixtures of silane in the dilute limit which is a somewhat realistic case. In addition, analytic solutions are invaluable to verify numerical solutions obtained from computeraided methods. Hence, here we provide new analytic solutions for the purification loops proposed. Among the common impurities in crude silane, methane poses a special membrane separation challenge since it is chemically similar to silane. Other potential problematic compounds are: ethylene, diborane and ethane (in this order). Nevertheless, we demonstrate, theoretically, that a carefully designed membrane system may be able to purify mono-isotopic, crude silane to electronics-grade level in a reasonable amount of time and expenses. We advocate a combination of membrane materials that preferentially reject heavy impurities based on mobility selectivity, and light impurities based on solubility selectivity. We provide estimates for the purification of significant contaminants of interest. In this study, we suggest cellulose acetate and polydimethylsiloxane as examples of membrane materials on the basis of limited permeability data found in the open literature. We provide estimates on the membrane area needed and priming volume of the cell enclosure for fabrication purposes when using the suggested membrane materials. These estimates are largely theoretical in view of the absence of reliable experimental data for the permeability of silane. Last but not least, future extension of this work to the non-dilute limit may apply to the recovery of silane from rejected streams of natural silicon semiconductor processes.

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“…for a fast permeant impurity. In the dilute limit, use of (8) in (15) or (9) in (16) leads to the same result…”

Section: Binary Gas Mixture In the Dilute Limitmentioning

confidence: 65%

Section: Introductionmentioning

confidence: 94%