Fine embossing of chalcogenide glasses: First time submicron definition of surface embossed features

Pan, Wenfeng; Furniss, David; Rowe, H.; Miller, Cheryl A.; Loni, A.; Sewell, P.; Benson, T.M.; Seddon, Angela B.

doi:10.1016/j.jnoncrysol.2006.10.077

Cited by 18 publications

(17 citation statements)

References 6 publications

(6 reference statements)

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“…NIL can be used with hard (quartz, silicon, metal, or tungsten carbide, etc.) molds, with which imprinting has been demonstrated for optical waveguides (4.5−6 μm wide and 2 μm high) into As 2 Se 3 film by using Si mold during hot embossing [6], submicrometer nano-cone arrays into Ge 15 As 15 Se 17 Te 53 bulk glass by using Si mold [7], sub-micrometerperiod wiregrid polarizer into Sb-Ge-Sn-S bulk glass by using SiC mold [8], micrometer-size anti-reflection surfaces at the ends of infra-red (IR) As 2 S 3 chalcogenide glass (ChG) fibers by using Ni mold [9], and sub-micrometer diffraction grating in Ge 20 As 20 Se 14 Te 46 bulk glasses by using Si, SiO 2 and Ni molds [10].…”

Section: Introductionmentioning

confidence: 99%

Sub-micrometer soft lithography of a bulk chalcogenide glass

Kohoutek¹,

Orava²,

Greer³

et al. 2013

Opt. Express

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Abstract:We demonstrate, for the first time, time-and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of submicrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe2 bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, antireflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing. References and links1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Nanoimprint lithography," J. Vac. Sci. Technol. B 14(6), 4129-4133 (1996). 2. Y. Xia and G. M. Whitesides, "Soft lithography," Angew. Chem. Int. Ed. 37(5), 550-575 (1998)

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Section: Introductionmentioning

confidence: 99%

Sub-micrometer soft lithography of a bulk chalcogenide glass

Kohoutek¹,

Orava²,

Greer³

et al. 2013

Opt. Express

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“…[19][20][21][22][23] Hot embossing of chalcogenide glass is conceptually straightforward [ Fig. 1(a)].…”

Section: Processingmentioning

confidence: 99%

“…This is made possible because chalcogenide glasses are readily shaped and patterned above their glass transition (T g ) and, on cooling below T g , the shaping and patterning are frozen-in. In this way, passive monomode rib waveguides of high numerical aperture (NA) have been demonstrated using hot embossing by hard mold with a variety of approaches [19][20][21][22][23] via fiber-on-glass (FOG), thermally evaporated films, and radio frequency (RF)-sputtered films, on glass. Mixed approaches of combined plasma etching and hot embossing increase the versatility still further for engineering optical circuits on a single platform.…”

Section: Introductionmentioning

confidence: 99%

“…Mixed approaches of combined plasma etching and hot embossing increase the versatility still further for engineering optical circuits on a single platform. This paper will review the latter body of work (for the detailed methodology see the original references [19][20][21][22][23][24] draw overaching conclusions and demonstrate how it is helping to pave the way for miniaturization of photonic chip devices for rapid and inexpensive scale-up of manufacture.…”

Section: Introductionmentioning

confidence: 99%

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Mid-infrared integrated optics: versatile hot embossing of mid-infrared glasses for on-chip planar waveguides for molecular sensing

et al. 2014

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Abstract. The versatility of hot embossing for shaping photonic components on-chip for mid-infrared (IR) integrated optics, using a hard mold, is demonstrated. Hot embossing via fiber-on-glass (FOG), thermally evaporated films, and radio frequency (RF)-sputtered films on glass are described. Mixed approaches of combined plasma etching and hot embossing increase the versatility still further for engineering optical circuits on a single platform. Application of these methodologies for fabricating molecular-sensing devices on-chip is discussed with a view to biomedical sensing. Future prospects for using photonic integration for the new field of mid-IR molecular sensing are appraised. Also, common methods of measuring waveguide optical loss are critically compared, regarding their susceptibility to artifacts which tend artificially to depress, or enhance, the waveguide optical loss.

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“…8 Others exploit the inherent photosensitivity of GLS to write features directly with UV lasers. 9 In similar glass sulfides, there have been demonstrations of more exotic techniques such as hot embossing, [10][11][12] or photodissolution of silver, 13,14 which also has the potential to increase radiative efficiency through the local field enhancement of metal nanoparticles. 15 …”

Section: Gallium Lanthanum Sulfide Glassesmentioning

confidence: 99%

Fabrication of photonic crystals in rare-earth doped chalcogenide glass films for enhanced upconversion

Pollard¹,

Knight²,

Parker³

et al. 2012

Optical Components and Materials IX

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Gallium lanthanum oxysulfide (GLSO) is a promising host material for observing strong upconversion emission from trivalent rare-earth ions such as erbium (Er 3+ ). Its attractive properties include high rare-earth solubility due to the lanthanum content of the glass former, a high refractive index (n = 2.2 at 550nm) for high radiative efficiency, and a low maximum phonon energy of approximately 425cm −1 . Photonic crystals meanwhile can provide controlled light extraction, and may be capable of suppressing unwanted IR emission from lower lying metastable states. Here, we describe the fabrication of photonic crystals in annealed films of Er 3+ -doped GLSO deposited by RF sputtering. The most intense visible upconversion emission is observed in films annealed at 550• C, close to the bulk glass transition temperature. Hexagonal lattice photonic crystals are subsequently milled into the films using a focused ion beam (FIB). The milling parameters are optimized to produce the most vertical sidewall profile.

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Fine embossing of chalcogenide glasses: First time submicron definition of surface embossed features

Cited by 18 publications

References 6 publications

Sub-micrometer soft lithography of a bulk chalcogenide glass

Sub-micrometer soft lithography of a bulk chalcogenide glass

Mid-infrared integrated optics: versatile hot embossing of mid-infrared glasses for on-chip planar waveguides for molecular sensing

Fabrication of photonic crystals in rare-earth doped chalcogenide glass films for enhanced upconversion

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