Sub-micrometer soft lithography of a bulk chalcogenide glass

Abstract

Abstract:We demonstrate, for the first time, time-and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of submicrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe2 bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, antireflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing. References and links1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Nanoimprint lithography," J. Vac. Sci. Technol. B 14(6), 4129-4133 (1996). 2. Y. Xia and G. M. Whitesides, "Soft lithography," Angew. Chem. Int. Ed. 37(5), 550-575 (1998)

Enhanced surface patterning of chalcogenide glass via imprinting process using a buffer layer

“…On the basis of this result, it was inferred that transferability in this kind of imprinting technique was limited to a few micrometers in the vertical direction. In fact, this behavior was already observed in previous works [4,14]. In order to investigate the transferability in the vertical direction in more detail, we made use of another quasi-three-dimensional pattern, i.e., an array of inverted four-story pagodas (Fig.…”

“…Based on our preliminary experiments performed to set suitable imprinting conditions, i.e., temperature, duration and displacement, imprinting at 255 • C resulted in a best performance. This temperature corresponded to a viscosity of ∼10 8 Pa s for As 2 S 3 glass [13], which belonged to the typical viscosity range previously suggested for imprinting this group of chalcogenide glass [1,3,14]. For all of the imprinting experiments in this study, temperature was thus fixed at 255 • C, but duration was allowed to vary typically from 600 s to 1800s according to geometry of the patterns.…”

Coherent Mid-IR Supercontinuum Generation using Tapered Chalcogenide Step-Index Optical Fiber: Experiment and modelling

“…6. The absorption peak at ~2.9 µm is due to the OH impurity in the glass, and another absorption peak at ~12.7 µm exists because of Se-OH bonds 40 . The confinement losses of the fundamental mode have been obtained at various core sizes of the fiber varying from 7 µm to 15 μm.…”

Infrared microlenses and gratings of chalcogenide: confined self-organization in solution processed thin liquid films

“…[5][6][7] Although hot embossing or laser inscribing of these microstructures are well established techniques for bulk ChG in order to demonstrate the feasibility of these methods, patterning of thin lms has received more interest recently since typical required heights of these structures is only a few micrometers. [7][8][9][10][11] Earlier, these thin ChG lms were created with thermal evaporation mostly, but now solution processed ChG lms are beginning to show signicant advantages on lms deposited thermally. 1,2,[12][13][14][15][16][17][18][19][20][21][22] It has been shown that various amine solvents dissolve ChG via nucleophilic substitution of sulphide or selenide units with amine groups and may prove to be ideal for creating thin lms and structures for photonic, electronic or imaging application.…”