Film Characterization and Some Basic Film Properties

Mattox, Donald M.

doi:10.1016/b978-081551422-0.50011-5

Cited by 4 publications

(4 citation statements)

References 68 publications

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“…Hardness H and elastic modulus E were calculated from the indentation load-displacement data by the Oliver Pharr method [19,20]. In accordance with the literature of the subject [14,[21][22][23], the indentation depth was maintained below 10% of the coating thickness. It should be noted that, out of approx.…”

Section: Methodsmentioning

confidence: 99%

Cavitation Erosion and Sliding Wear Mechanisms of AlTiN and TiAlN Films Deposited on Stainless Steel Substrate

et al. 2019

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The resistance to cavitation erosion and sliding wear of stainless steel grade AISI 304 can be improved by using physical vapor deposited (PVD) coatings. The aim of this study was to investigate the cavitation erosion and sliding wear mechanisms of magnetron-sputtered AlTiN and TiAlN films deposited with different contents of chemical elements onto a stainless steel SS304 substrate. The surface morphology and structure of samples were examined by optical profilometry, light optical microscopy (LOM) and scanning electron microscopy (SEM-EDS). Mechanical properties (hardness, elastic modulus) were tested using a nanoindentation tester. Adhesion of the deposited coatings was determined by the scratch test and Rockwell adhesion tests. Cavitation erosion tests were performed according to ASTM G32 (vibratory apparatus) in compliance with the stationary specimen procedure. Sliding wear tests were conducted with the use of a nano-tribo tester, i.e., ball-on-disc apparatus. Results demonstrate that the cavitation erosion mechanism of the TiAlN and AlTiN coatings rely on embrittlement, which can be attributed to fatigue processes causing film rupture and internal decohesion in flake spallation, and thus leading to coating detachment and substrate exposition. At moderate loads, the sliding wear of thin films takes the form of grooving, micro-scratching, micro-ploughing and smearing of the columnar grain top hills. Compared to the SS reference sample, the PVD films exhibit superior resistance to sliding wear and cavitation erosion.

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Section: Methodsmentioning

confidence: 99%

Cavitation Erosion and Sliding Wear Mechanisms of AlTiN and TiAlN Films Deposited on Stainless Steel Substrate

et al. 2019

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“… In-situ substrate cleaning: In the case of sputtering, in-situ cleaning of the substrate is possible by altering the voltage polarity between the target and substrate to improve the purity of the deposited film Low gaseous contamination: Gaseous contamination in the created films is limited due to the presence of a vacuum environment in a deposition chamber, and this results in the excellent purity of the product material film …”

Section: Advantages and Disadvantages Of Materials Deposited Through ...mentioning

confidence: 99%

“… 159 Low gaseous contamination: Gaseous contamination in the created films is limited due to the presence of a vacuum environment in a deposition chamber, and this results in the excellent purity of the product material film. 160 …”

Section: Advantages and Disadvantages Of Materials Deposited Through ...mentioning

confidence: 99%

Exploring Vacuum-Assisted Thin Films toward Supercapacitor Applications: Present Status and Future Prospects

Shivasharma,

Upadhyay,

Deshmukh

et al. 2023

ACS Omega

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Demand for high-performance energy storage devices is growing tremendously. Supercapacitors possess an excellent candidature to fulfill the energy storage requisites such as high energy density when compared to conventional capacitors, high power density, and cycling stability as compared to batteries, though not only for large-scale devices for higher energy/power density applications but also for macro- to microdevices for miniaturized electrical components. With the aid of various routes, many materials have been explored with well-tuned properties with controlled surface architecture through various preparative parameters to find those best suited for supercapacitive electrodes. Growth of a thin film can be accomplished through chemical or physical (vacuum-assisted) routes. Vacuum-assisted (physical) growth yields high purity, precise dimensions with a line-of-sight deposition, along with high adhesion between the film and the substrates, and hence, these techniques are necessary to manufacture many macro- to microscale supercapacitor devices. Still, much effort has not been put forth to explore vacuum-assisted techniques to fabricate supercapacitive electrodes and energy storage applications. The present review explores the first comprehensive report on the growth of widespread materials through vacuum-assisted physical deposition techniques inclusive of thermal evaporation, e-beam evaporation, sputtering, and laser beam ablation toward supercapacitive energy storage applications on one platform. The theoretical background of nucleation and growth through physical deposition, optimization of process parameters, and characterization to supercapacitor applications from macro- to microscale devices has been well explored to a provide critical analysis with literature-reviewed materials. The review ends with future challenges to bring out upcoming prospects to further enhance supercapacitive performance, as much work and materials need to be explored through these routes.

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“…As stated by Mattox [61], these methods can be subdivided into mass, geometrical, and property thicknesses. Mass thickness is measured in µg/cm 2 (e.g., by mass spectroscopy) but does not take into account the density, micro structure, composition, or surface morphology.…”

Section: Importance Of Coating Thickness For Barrier Propertiesmentioning

confidence: 99%

Thickness Measurement Methods for Physical Vapor Deposited Aluminum Coatings in Packaging Applications: A Review

Lindner

Schmid

2017

Coatings

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Abstract:The production of barrier packaging materials, e.g., for food, by physical vapor deposition (PVD) of inorganic coatings such as aluminum on polymer substrates is an established and well understood functionalization technique today. In order to achieve a sufficient barrier against gases, a coating thickness of approximately 40 nm aluminum is necessary. This review provides a holistic overview of relevant methods commonly used in the packaging industry as well as in packaging research for determining the aluminum coating thickness. The theoretical background, explanation of methods, analysis and effects on measured values, limitations, and resolutions are provided. In industrial applications, quartz micro balances (QCM) and optical density (OD) are commonly used for monitoring thickness homogeneity. Additionally, AFM (atomic force microscopy), electrical conductivity, eddy current measurement, interference, and mass spectrometry (ICP-MS) are presented as more packaging research related methods. This work aims to be used as a guiding handbook regarding the thickness measurement of aluminum coatings for packaging technologists working in the field of metallization.

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Film Characterization and Some Basic Film Properties

Cited by 4 publications

References 68 publications

Cavitation Erosion and Sliding Wear Mechanisms of AlTiN and TiAlN Films Deposited on Stainless Steel Substrate

Cavitation Erosion and Sliding Wear Mechanisms of AlTiN and TiAlN Films Deposited on Stainless Steel Substrate

Exploring Vacuum-Assisted Thin Films toward Supercapacitor Applications: Present Status and Future Prospects

Thickness Measurement Methods for Physical Vapor Deposited Aluminum Coatings in Packaging Applications: A Review

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