Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Jian, Rih Sheng; Wang, Tse-Yu; Song, Lung Yu; Kuo, Chun Yen; Tian, Wei; Lo, Ei Wen; Lu, Chia Jung

doi:10.1016/j.buildenv.2015.08.023

Cited by 17 publications

(5 citation statements)

References 32 publications

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“…Since the pioneering work by Terry et al, portable gas chromatography (GC) systems have been intensively investigated for a broad range of field applications such as environmental (air, water, and soil), chemical (explosive vapors, and chemical warfare agents), pharmaceutical or clinical (urine), and anthropogenic (indoor gas and operation) gas monitoring. − However, current portable GC systems, particularly those that have been commercialized such as Photovac Voyager GC (Photovac Inc.), Portable zNose (Electronic Sensor Technology), SeaPORT Mini-GC (Seacoast Science Inc.), 490 Micro GC (Agilent Technologies), FROG-4000 (Defiant Technologies), and 3000 Micro GC Gas Analyzer (Inficon) are simply miniaturized versions of the one-dimensional (1-D) benchtop GC. While field-deployable and rapid in vapor analysis, they suffer severely from deteriorated separation capability or peak capacity due primarily to the short column length, wide peak width resulting from miniaturization, and requirement for short analysis time.…”

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confidence: 99%

“…While field-deployable and rapid in vapor analysis, they suffer severely from deteriorated separation capability or peak capacity due primarily to the short column length, wide peak width resulting from miniaturization, and requirement for short analysis time. Therefore, they usually can separate only a small set or limited, well-defined class of vapors (such as chlorinated alkenes) and often fail when complex sample matrixes or analyte mixtures are present.…”

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confidence: 99%

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Fully Automated Portable Comprehensive 2-Dimensional Gas Chromatography Device

et al. 2016

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We developed a fully automated portable 2-dimensional (2-D) gas chromatography (GC x GC) device, which had a dimension of 60 cm × 50 cm × 10 cm and weight less than 5 kg. The device incorporated a micropreconcentrator/injector, commercial columns, micro-Deans switches, microthermal injectors, microphotoionization detectors, data acquisition cards, and power supplies, as well as computer control and user interface. It employed multiple channels (4 channels) in the second dimension (D) to increase the D separation time (up to 32 s) and henceD peak capacity. In addition, a nondestructive flow-through vapor detector was installed at the end of the D column to monitor the eluent fromD and assist in reconstructing D elution peaks. With the information obtained jointly from theD and D detectors,D elution peaks could be reconstructed with significantly improved D resolution. In this Article, we first discuss the details of the system operating principle and the algorithm to reconstructD elution peaks, followed by the description and characterization of each component. Finally, 2-D separation of 50 analytes, including alkane (C-C), alkene, alcohol, aldehyde, ketone, cycloalkane, and aromatic hydrocarbon, in 14 min is demonstrated, showing the peak capacity of 430-530 and the peak capacity production of 40-80/min.

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Fully Automated Portable Comprehensive 2-Dimensional Gas Chromatography Device

et al. 2016

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“…8 Jian et al applied real-time, onsite analyzer consisting of a GC and a photo-ionization detector (PID) for monitoring various VOC concentration in parts-per-billion range in the process environment. 9 Analysis of surface deposition is even more subtle, though commercial designs such as Wafer Outgassing System (WOS)-equipment that functions by heating a contaminated wafer to the desired temperature to release the surface-bound organic compounds, which can be sampled via the solid-phase extraction technique-has helped facilitate the research endeavor in this area. While these techniques are useful to understand the mechanisms of surface contamination, they lack the real-time capability to serve as a monitoring and preventive response tool.…”

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confidence: 99%

Review—Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing

Den

Garza

et al. 2020

ECS J. Solid State Sci. Technol.

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This review paper focuses on the recent knowledge about airborne molecular contamination (AMC) and its impacts on 300-mm wafer fabrication processes. The adverse impacts on process materials by both organic and inorganic micro-contaminants, and evidence of cross-contamination between processed wafers and the mainstream wafer handling tools, are two areas of discussion for the study. The review also aims to re-frame the industrial guideline for AMC from chemical-based to risk-based approach, which substantiates the potential impacts of individual families of AMCs that have been well-documented. This approach resonates well with the new AMC classification method recently proposed by the International Roadmap of Devices and Systems (IRDS), building on new knowledge of AMC emerged over time with the advances of analytical and testing capability. The review also brings forth the impact of moisture, the mere presence of which can compromise the integrity of device structures. However, moisture is especially detrimental in the presence of other inorganic ions to trigger unwanted reactions with surface materials. Methods developed to minimize the micro-contaminants and moisture during wafer handling and storage are also reviewed.

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“…It is well known that organic solvents are often used in industries. These common organic solvents include isopropyl alcohol and acetone, which are used for processes such as wafer cleaning [ 9 ] and photoresist removal [ 10 ]. Acetone is considered a volatile organic compound with similar characteristics to other organic volatile gases such as benzene, ethanol, formaldehyde, etc., and excessive inhalation can lead to neurological toxicity [ 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

Growth and Characterization of Sputtered InAlN Nanorods on Sapphire Substrates for Acetone Gas Sensing

Horng,

Cho,

Chang

et al. 2023

Nanomaterials

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The demand for highly sensitive and selective gas sensors has been steadily increasing, driven by applications in various fields such as environmental monitoring, healthcare, and industrial safety. In this context, ternary alloy indium aluminum nitride (InAlN) semiconductors have emerged as a promising material for gas sensing due to their unique properties and tunable material characteristics. This work focuses on the fabrication and characterization of InAlN nanorods grown on sapphire substrates using an ultra-high vacuum magnetron sputter epitaxy with precise control over indium composition and explores their potential for acetone-gas-sensing applications. Various characterization techniques, including XRD, SEM, and TEM, demonstrate the structural and morphological insights of InAlN nanorods, making them suitable for gas-sensing applications. To evaluate the gas-sensing performance of the InAlN nanorods, acetone was chosen as a target analyte due to its relevance in medical diagnostics and industrial processes. The results reveal that the InAlN nanorods exhibit a remarkable sensor response of 2.33% at 600 ppm acetone gas concentration at an operating temperature of 350 °C, with a rapid response time of 18 s. Their high sensor response and rapid response make InAlN a viable candidate for use in medical diagnostics, industrial safety, and environmental monitoring.

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Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Cited by 17 publications

References 32 publications

Fully Automated Portable Comprehensive 2-Dimensional Gas Chromatography Device

Fully Automated Portable Comprehensive 2-Dimensional Gas Chromatography Device

Review—Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing

Growth and Characterization of Sputtered InAlN Nanorods on Sapphire Substrates for Acetone Gas Sensing

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