2017 30th International Vacuum Nanoelectronics Conference (IVNC) 2017
DOI: 10.1109/ivnc.2017.8051582
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Field emission from silicon tips embedded in a dielectric matrix

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Cited by 2 publications
(3 citation statements)
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“…In this work, we instead use atomically sharp Si emitters with self-aligned gates to extract electrons at voltages of less than 20 V as a separate electron source. Such devices have been reported previously in [10,15], having tip radius, r ∼ 3-8 nm, self-aligned poly-Si gate apertures of approximately 350 nm in diameter, and integrated high aspect ratio nanowires current limiters; arrays (10 8 emitters/cm 2 ) of these emitters have low turn-on voltage, V ON , of 8.5 V, low operating voltage (40 V), high current density (150 A•cm −2 ) and long lifetime (> 300 hours) [15]. Using this low-voltage gated Si field emission source, we characterize the low-energy electron transmission through suspended membranes with different number of graphene layers.…”
Section: Introductionmentioning
confidence: 56%
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“…In this work, we instead use atomically sharp Si emitters with self-aligned gates to extract electrons at voltages of less than 20 V as a separate electron source. Such devices have been reported previously in [10,15], having tip radius, r ∼ 3-8 nm, self-aligned poly-Si gate apertures of approximately 350 nm in diameter, and integrated high aspect ratio nanowires current limiters; arrays (10 8 emitters/cm 2 ) of these emitters have low turn-on voltage, V ON , of 8.5 V, low operating voltage (40 V), high current density (150 A•cm −2 ) and long lifetime (> 300 hours) [15]. Using this low-voltage gated Si field emission source, we characterize the low-energy electron transmission through suspended membranes with different number of graphene layers.…”
Section: Introductionmentioning
confidence: 56%
“…UHV is essential for reliable field emission performance due to the barrier height sensitivity to adsorption/desorption of gas molecules, and variations in this barrier height cause exponential variations in current [9]. In addition, a non-pristine vacuum can also lead to the generation of energetic ions that erode the emitter tips, rendering the tips blunt and deteriorating electrical performance [10]. Operation in poor vacuum using a graphene-encapsulated field emitter device at voltages less than 50 V was demonstrated in our previous work, which showed promise for poor vacuum electron transport [11].…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the sealing size level is still at the micrometer level or even a millimeter scale. Recently, emerging materials were used for vacuum enclosure such as graphene which has high transparency and ultrathin thickness. Therefore, it is possible to pass the electric field and electrons. So, it works as an electrode (grid) and as vacuum encapsulation.…”
mentioning
confidence: 99%