Vacuum Tunneling Transistor with Nano Vacuum Chamber for Harsh Environments
Su Jin Heo,
Jeong Hee Shin,
Byoung Ok Jun
et al.
Abstract:A nano vacuum tube which consists of a vacuum transistor
and a
nano vacuum chamber was demonstrated. For the device, a vacuum region
is an electron transport channel, and a vacuum is a tunneling barrier.
Tilted angle evaporation was studied for the formation of the nano
level vacuum chamber structure. This vacuum tube was ultraminiaturized
with several tens of 10–18 L scale volume and 10–6 Torr of pressure. The device structure made it possible
to achieve a high integration density and to sustain the vacuum st… Show more
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