The performance of two-dimensional
(2D) material devices is strongly
affected by the properties of the contacts. A good understanding of
the contact behavior is vitally important for building high-performance
devices. In this work, through studying the properties of field-effect
transistors, the Schottky barrier heights (SBHs) at the contacts between
the ferroelectric α-In2Se3 nanosheet and
metals are extracted. Three typical metals with various work functions,
titanium (Ti), chromium (Cr), and palladium (Pd), are used as the
source/drain electrodes. All the three types of devices show an n-type
field-effect character despite the large difference of the metal work
function (0.8 eV between Pd and Ti). SBHs are measured to be 52 meV
for the Pd contact and 24 meV for the Cr contact, while Ti forms an
Ohmic contact with α-In2Se3 nanosheets.
The results suggest a significant Fermi-level pinning near the bottom
of the conductive band of α-In2Se3. Using
the transfer length method (TLM), we find that the contact resistance
increases significantly (from 48 kΩ·μm to 4.03 MΩ·μm
for the Ti contact and from 288 kΩ·μm to 7.10 MΩ·μm
for the Pd contact) as the In2Se3 thickness
decreases from 56 nm to about 20 nm for both the Pd and Ti contacts,
while the contact resistance for the Pd contact is several times larger
than that for the Ti contact. These results are significant to understand
the contact properties of 2D ferroelectric materials and provide a
strong foundation for the application of α-In2Se3 in nanodevices.