Fibre optic sensor: Integration with micromachined devices

Semiconductor Optical Sensors

“…A second direction combines integrated optics with mechanics [103,104], leading to structures based on waveguide optics; sensors based on this approach will be the subject of Section 1.3. In a third concept, interrogation of a micromechanical transducer using optical fibers has seen a considerable activity [105], perhaps due in part to the wide availability of fiber-pigtailed light sources.…”