Fiber optic Fabry–Perot pressure sensor based on lensed fiber and polymeric diaphragm

Photonic crystal fiber micro pressure sensor based on an extrinsic Fabry-Perot interferometer fabricated by femtosecond laser

“…Upon heating, the thermal mismatch between three-layer diaphragm usually results in the fracture of the sensor. [10] The silk fibroin diaphragm based sensor shows a response of 12.3nm/kPa in terms of cavity length change, but the measured maximum pressure is only 80kPa. It is limited by the mechanical strength of the silk fibroin.…”

“…[5] The whole sensor head is etched, so that the mechanical strength is weakened. [7] The diaphragms are attached to seal the microcavity, including chemical vapor deposition of grapheme [9], bonding of a polymeric diaphragm [10] and attachment of silk fibroin. [11] The grapheme-diaphragm based sensor had a problem of leakage.…”

Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications

“…Compared with piezoresistive and capacitive sensors, fiber-optic pressure sensors offer high temperature capability, EMI immunity, and corrosion and oxidation resistance [10,11]. Diaphragm-based extrinsic Fabry-Perot interferometer (EFPI) pressure sensors are widely reported for healthcare, automotive, and aerospace applications, in which the diaphragm materials used include polymers [12,13], metals [14,15], silica [16,17], silicon [18,19], and other ceramics [20]. The working temperature of an EFPI pressure sensor is limited by the material of its diaphragm.…”

Fiber optic low-coherence Fabry-Pérot interferometer with ZnO layers in transmission and reflective mode: comparative study

“…A fiber-optic Fabry-Pérot interferometers are used for sensing of many physical and biological parameters such as: temperature, pressure, and humidity but also sugar content in aqueous solution [1][2][3][4][5][6][7][8][9] or hematocrit value of human blood [10][11][12][13] . Recently, intrinsic ("all fiber") interferometers gains more popularity, nonetheless extrinsic constructions, where the cavity is located on the outside of the fiber, is still widely deployed -partially because of easier fabrication process but also specific demands of some applications [14][15][16][17][18] .…”