2009
DOI: 10.1016/j.jallcom.2009.08.049
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Ferroelectric properties of highly (111)-oriented Pb(Zr1−x, Tix)O3 thin films with different Zr/Ti ratios

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Cited by 19 publications
(12 citation statements)
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“…The sol-gel method was used to prepare the films on the Pt (1 1 1)/Ti/SiO2/Si (1 0 0) substrates, which has been described in detail elsewhere [11]. The concentration of the (Pb 1-3x/2 Lax)(Zr0.6Ti0.4)O3 precursors (0 ≤ x ≤ 0.08) was all adjusted to 0.3 M. Each layer was spin-coated on the substrate at 3000 rpm for 15 s, and then the wet film was dried on a hot plate at 425 • C for 3 min.…”
Section: Methodsmentioning
confidence: 99%
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“…The sol-gel method was used to prepare the films on the Pt (1 1 1)/Ti/SiO2/Si (1 0 0) substrates, which has been described in detail elsewhere [11]. The concentration of the (Pb 1-3x/2 Lax)(Zr0.6Ti0.4)O3 precursors (0 ≤ x ≤ 0.08) was all adjusted to 0.3 M. Each layer was spin-coated on the substrate at 3000 rpm for 15 s, and then the wet film was dried on a hot plate at 425 • C for 3 min.…”
Section: Methodsmentioning
confidence: 99%
“…In order to optimize the performance of thin films, it is essential to understand those factors that may influence the properties of ferroelectric thin films. Our previous studies have shown that the polarization behavior of polycrystalline PZT thin films greatly depends on preferred orientation, monoclinic phase and associated residual stress [11][12][13]. For example, the 300 nm thick Pb(Zr 0.52 Ti 0.48 )O 3 film exhibits higher remnant polarization value than that of the 200 nm thick PZT film [12].…”
Section: Introductionmentioning
confidence: 99%
“…Lead-based piezoceramics such as lead titanate (PT) and lead zirconate titanate (PZT) are widely used in commercial applications due to their significantly high piezoelectric properties [1][2][3]. Considering the toxicity of lead-based ceramics, negative human health impacts and possibility for environmental pollutants that can be caused over their lifecycle, it is clear a substitute is needed [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric ceramics based on the perovskite Pb(Zr 1−x Ti x )O 3 (PZT) system are widely used as sensors and actuators because of their excellent dielectric, piezoelectric, and electrostrictive properties [1][2][3][4][5][6][7][8][9][10][11]. However, the major disadvantage of PZT ceramics is the relatively low Curie temperatures T c (∼300 • C).…”
Section: Introductionmentioning
confidence: 99%