Traditional UV photodetectors based on photomultiplier tubes [9] require bulky, vacuum-based components, which brings high cost and high temperature sensitivity. Wide bandgap semiconductors such as diamond, [10] ZnO, [11] GaN, [12] SiC, [13] and Ga 2 O 3 [14] have been demonstrated for UV detection in recent years. They also have other shortcomings, such as fragility, high working voltage, high cost, low sensitivity, long response time, and are difficult to integrate. These characteristics limit the application of traditional UV detection systems.Recently, three-terminal thin-film transistors (TFTs) have gained widespread interest [15][16][17] owing to gate bias control functionality, pixel array integration, and the ease of on-panel processability. Indium-gallium-zinc oxide (IGZO), a typical n-type semiconductor with a large band gap about 3.2 eV, are widely used in TFTs for active-matrix displays. [18] IGZO has shown great potential in UV optoelectronic applications [19] on account of high mobility, room-temperature fabrication, and good chemical stability. The deep UV IGZO phototransistors have reported using Ta 2 O 5 [20] or Ga 2 O 3 [21] as dielectrics. Yet, they suffer from low photoresponsivity (<100 A W -1 or <1 A W -1 ) and high dark current (≈1 nA). The TFTs decorated with aligned SnO 2 nanowire [22] was presented with much higher photoresponsivity (≈328 A W -1 ). However, a complex manufacturing process was involved. To summarize, these previous studies on IGZO photodetectors mostly exhibited high dark current, low sensitivity, or complex manufacturing.Fortunately, ferroelectric films have shown excellent performance in optoelectronic devices to depress the dark current. [23][24][25][26][27][28][29][30] Ultrahigh localized electric field introduced by ferroelectric films deplete the background charge carriers of the semiconductor channel which is larger than that depleted by gate bias in traditional field effect transistors. [31] Moreover, plasmon resonance excited by gold (Au) nanoparticles (NPs) have been proved an effective method to enhance photocurrent response. [32,33] The localized surface plasmon resonance (LSPR) in Au NPs leads to electrons oscillation. Light is trapped around the surface of Au NPs due to the oscillation, leading to an improving of light absorption.In this work, we demonstrate a high-performance UV photodetector based on IGZO channel with hafnium zirconium Indium-gallium-zinc oxide (IGZO) is widely used in liquid crystal panels, which are well suited for ultraviolet (UV) photodetectors due to a suitable bandgap and outstanding electrical properties. However, the poor performance for high dark current and low photoresponsivity limits practical applications of IGZO in UV photodetection. Here, a ferroelectric hafnium zirconium oxide (HfZrO) film is introduced to depress dark current and increase the sensitivity by strong ferroelectric-localized field. Meanwhile, gold nanoparticles are used to enhance the photoresponsivity by localized surface plasmon resonance. With optimized des...