“…Moreover, the reported Curie temperature (T c ) and piezoelectric coefficient (d 33 ) are approximately 230 C and 150 pC/N, respectively, for the composition of 0.9NaNbO 3 -0.1BaTiO 3 , which are relatively high values compared with those of other lead-free piezoelectric materials. 8) On the other hand, to apply ferroelectric materials to electronic thin-film device applications, such as piezoelectric microelectromechanical system (MEMS) devices, thin-film processing has become increasingly important. Among several thin-film processing methods, chemical solution deposition (CSD) is a representative process with several advantages, such as high homogeneity, low-temperature fabrication, precise control of chemical composition, and low equipment costs.…”