Ferroelectric and antiferroelectric films for microelectromechanical systems applications

Xu, Baomin; Cross, L. E.; Bernstein, J.

doi:10.1016/s0040-6090(00)01322-5

Cited by 105 publications

(67 citation statements)

References 17 publications

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“…The precise manufacturing of fine ferroelectric structures has found use in MEM devices [32][33][34][35][36][37][38][39][40], NEM devices [41], nonvolatile memories [42][43][44] and integrated optics [13,16,17]. Conventionally, piezoelectric elements have been processed by chemical wet etching or argon milling techniques.…”

Section: Figmentioning

confidence: 99%

“…The selective removal of a material can have disastrous effects, such as in the case of corrosion, or being used to craft useful, precisely engineered structures like undercut etching in microelectromechanical (MEM) or nanoelectromechanical (NEM) device fabrication [32][33][34][35][36][37][38][39][40][41]. Regardless whether the process is Fig.…”

Section: Introductionmentioning

confidence: 99%

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Coupling of piezoelectric effect with electrochemical processes

2015

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The coupling effect between piezoelectric polarization and electrochemical processes depicts the engineering of charge-carrier conduction characteristics at the heterojunction between a strained piezoelectric material and a chemical solution. It is a unique subcategory of piezotronics. This mini review paper introduces the fundamental principles of such coupling effects. Applications of this coupling effect are reviewed and discussed in several different aspects, including selective etching enabled by piezo(ferro)-electric polarization; selective (photo)electrochemical deposition directed by piezo(ferro)-electric potential; and the directly utilization of piezoelectric potential to drive electrochemical reactions (piezocatalysis). At the end, perspectives of this coupling effect are discussed as a new approach in the fields of corrosion management, nanomanufacturing and renewable energy conversion.

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Section: Figmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Coupling of piezoelectric effect with electrochemical processes

2015

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“…For example, piezoelectric materials offer actuating properties with nanoscale resolution and large actuation forces over a broad range of frequencies (Hz-MHz). This provides advantages in numerous applications such as high resolution acoustic imaging [1], morphing aircraft control surfaces [2], and high resolution nanopositioning stages [3,4]. High force magnetostrictive materials such as Terfenol-D provide broadband capability (DC up to 20 kHz) with forces up to 550 N [5,6], which are utilized in many industrial settings such as high-speed precision machining [7].…”

Section: Sponsoring/monitoring Agency Name(s) and Address(es) 10 Spomentioning

confidence: 99%

“…(38) such as finite differences and nonlinear multiple shooting [35]. The finite difference approach is used here where we consider a discretization of the time interval [t 0 , t f ] with a uniform mesh having stepsize ∆t and points t 0 , t 1 …”

Section: Magnetostrictive and Damped Oscillator Parametersmentioning

confidence: 99%

Optimal Tracking Using Magnetostrictive Actuators Operating in Nonlinear and Hysteretic Regimes

Oates

Smith

2009

Journal of Dynamic Systems, Measurement, and Control

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Many active materials exhibit nonlinearities and hysteresis when driven at field levels necessary to meet stringent performance criteria in high performance applications. This often requires nonlinear control designs to effectively compensate for the nonlinear, hysteretic field-coupled material behavior. In this paper, an optimal control design is developed to accurately track a reference signal using magnetostrictive transducers. The methodology can be directly extended to transducers employing piezoelectric materials or shape memory alloys (SMAs) due to the unified nature of the constitutive model employed in the control design. The constitutive model is based on a framework that combines energy analysis at lattice length scales with stochastic homogenizations techniques to predict macroscopic material behavior. The constitutive model is incorporated into a finite element representation of the magnetostrictive transducer which provides the framework for developing the finite-dimensional nonlinear control design. The control design includes an open loop nonlinear component computed off-line with perturbation feedback around the optimal state trajectory. Estimation of unmeasurable states is achieved using a Kalman filter. The hybrid control technique provides the potential for real-time control implementation while providing robustness with regard to operating uncertainties and unmodeled dynamics.

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“…Therefore to reduce this critical field, a chemical modification of initial formula is often used. Actuation strains through antiferroelectricferroelectric phase transition in PZT solid solution has been described in many papers [1][2][3][4][5]. In recent years an extensive studies are devoted for more complex systems like (Pb,La)(Zr,Sn,Ti)O 3 and (Pb,Nb)(Zr,Sn,Ti)O 3 [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Pre-Transitional Effect and an Intermediate Phase in the Antiferroelectric PbZr_0.80Sn_0.20O₃Single Crystal

et al. 2010

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The temperature dependences of electrostrictive strain and birefringence for a PbZr 0.80 Sn 0.20 O 3 single crystal have been measured with a high accuracy close to the high temperature phase transitions into the paraelectric phase. Characteristic features are the existence of local maxima on M 11 (T) dependence and irregular n(T) dependences that indicate existence of an intermediate phase between the antiferroelectric and paraelectric phase. Above T C a local n(T) maximum appears on heating causedprobably by interactions of polar regions embedded in the non-polar cubic matrix. The existence of these regions could be accounted for by a disorder of Sn ions in the lead zirconate lattice.

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Ferroelectric and antiferroelectric films for microelectromechanical systems applications

Cited by 105 publications

References 17 publications

Coupling of piezoelectric effect with electrochemical processes

Coupling of piezoelectric effect with electrochemical processes

Optimal Tracking Using Magnetostrictive Actuators Operating in Nonlinear and Hysteretic Regimes

Pre-Transitional Effect and an Intermediate Phase in the Antiferroelectric PbZr_0.80Sn_0.20O₃Single Crystal

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Ferroelectric and antiferroelectric films for microelectromechanical systems applications

Cited by 105 publications

References 17 publications

Coupling of piezoelectric effect with electrochemical processes

Coupling of piezoelectric effect with electrochemical processes

Optimal Tracking Using Magnetostrictive Actuators Operating in Nonlinear and Hysteretic Regimes

Pre-Transitional Effect and an Intermediate Phase in the Antiferroelectric PbZr0.80Sn0.20O3Single Crystal

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Pre-Transitional Effect and an Intermediate Phase in the Antiferroelectric PbZr_0.80Sn_0.20O₃Single Crystal