Femtosecond laser direct writing of high-Q microresonators in glass and crystals

Lin, Jintian; Xu, Yang; Song, Jiangxin; Tang, Jialei; Fang, Zhiwei; Wang, Min; Fang, Wei; Cheng, Ya

doi:10.1117/12.2071737

Cited by 3 publications

(4 citation statements)

References 53 publications

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“…In order to strengthen the ablation effect, the processing speed in the x‐direction should be reduced and the hole distance processed by the two laser pulses should be reduced or even partially overlapped. Similarly, to shorten the processing time and improve the processing efficiency, the processing speed in the x‐direction should be appropriately increased; therefore, the hole distance processed by the two laser pulses should be increased. However, the possible maximum distance between two holes should be limited to 2 * ρ ( z ) ( ρ ( z ) is ablation radius under given ablation power).…”

Section: Direct Writing Inside Quartz Glass‐based Lavmentioning

confidence: 99%

Using femtosecond laser processing quartz glass microchannel sample cell

Wang

Liu

Huo

et al. 2019

Micro & Optical Tech Letters

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To improve the intensity and reliability of the emission fluorescence spectrum signal of petroleum pollutant samples, we designed multiple microchannel sample pools to replace traditional sample pool with square section. First, the microchannel structure of the sample pool was designed. Second, we analyzed the pulse intensity distribution and laser ablation volume (LAV) of a femtosecond laser. Then, based on the LAV, we tested the oblique motion of the laser focus at a 45° angle combined with the change in laser power, ablated a specific length region on the quartz glass surface, and indirectly determined the processed depth of the hole inside the quartz glass. Finally, using quartz glasses of 2, 5, and 10 mm in thickness as substrates, we separately varied the processing speed in the x‐direction, feed rate in the y‐direction, and laser output power of the laser processing platform, and obtained the shape‐structure of the microchannel inside the quartz glass under different processing parameter combinations. The experimental results demonstrate that the proposed method is effective at processing a specific hole depth inside the quartz glass. Experiments show that the sample cell can be used for comparative detection of fluorescence signals.

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Section: Direct Writing Inside Quartz Glass‐based Lavmentioning

confidence: 99%

Using femtosecond laser processing quartz glass microchannel sample cell

Wang

Liu

Huo

et al. 2019

Micro & Optical Tech Letters

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“…The Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, and the National University of Defense Technology all developed a resonator successfully by laser etching, whose diameter was 39 nm and 1 mm, respectively [ 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

“…Although there has been a flood of research to reveal the manufacturing process mechanisms to improve the modeling quality of the resonator, many problems remain [ 11 , 13 ], as shown in Table 1 . In contrast to the macroscopic hemispherical gyroscope, whose shaping characteristics can be eliminated via accurate post-processing, the MEMS hemispherical gyroscope has obvious shaping characteristics in its forming structure that cannot be compensated for due to its excessively small size.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II

Liu

Zhuang

et al. 2023

Micromachines

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Although one of the poster children of high-performance MEMS (Micro Electro Mechanical Systems) gyroscopes, the MEMS hemispherical resonator gyroscope (HRG) is faced with the barrier of technical and process limits, which makes it unable to form a resonator with the best structure. How to obtain the best resonator under specific technical and process limits is a significant topic for us. In this paper, the optimization of a MEMS polysilicon hemispherical resonator, designed by patterns based on PSO-BP and NSGA-II, was introduced. Firstly, the geometric parameters that significantly contribute to the performance of the resonator were determined via a thermoelastic model and process characteristics. Variety regulation between its performance parameters and geometric characteristics was discovered preliminarily using finite element simulation under a specified range. Then, the mapping between performance parameters and structure parameters was determined and stored in the BP neural network, which was optimized via PSO. Finally, the structure parameters in a specific numerical range corresponding to the best performance were obtained via the selection, heredity, and variation of NSGAII. Additionally, it was demonstrated using commercial finite element soft analysis that the output of the NSGAII, which corresponded to the Q factor of 42,454 and frequency difference of 8539, was a better structure for the resonator (generated by polysilicon under this process within a selected range) than the original. Instead of experimental processing, this study provides an effective and economical alternative for the design and optimization of high-performance HRGs under specific technical and process limits.

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“…Lithography approaches have been intensively used as a fabrication technique for planar geometry structures . In spite of being a robust and well established technology, lithography based techniques involve multistep processing and rely on selective material removal by chemical etching, which restricts the choices of materials, thereby hampering the widespread use of WGM microresonators . To overcome this drawback, femtosecond laser induced two‐photon polymerization (2PP) has emerged as an alternative.…”

mentioning

confidence: 99%

Femtosecond laser fabrication of high‐Q whispering gallery mode microresonators via two‐photon polymerization

Tomázio

Otuka

Almeida

et al. 2017

J Polym Sci B Polym Phys

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Whispering gallery mode microresonators have been triggering considerable advances in science due to their ability to confine light within small dielectric volumes, which makes them suitable for a wide range of applications. Lithographic approaches have been the dominant technique for fabricating microresonators; however, they restrict the choice of materials due to their multistep processing nature. As an alternative, they report the direct laser fabrication of acrylic based hollow microcylinder resonators, via two‐photon polymerization, with good structural integrity and sidewall roughness of 1.5 nm, which make them promising candidates for photonic applications in the near‐infrared. Such polymeric microresonators exhibit finesse close to 103 and a quality factor of 1 × 105, a performance achieved without any additional processing step, which would restrict the choices of materials to be incorporated into the polymeric resonator. This advantage thereby broadens the widespread use of the polymeric microresonators, making them an excellent platform for lasing and nonlinear optics studies in the near‐infrared. © 2017 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2017, 55, 569–574

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Femtosecond laser direct writing of high-Q microresonators in glass and crystals

Cited by 3 publications

References 53 publications

Using femtosecond laser processing quartz glass microchannel sample cell

Using femtosecond laser processing quartz glass microchannel sample cell

Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II

Femtosecond laser fabrication of high‐Q whispering gallery mode microresonators via two‐photon polymerization

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