Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator

Butkus, Antanas; Skliutas, Edvinas; Gailevičius, Darius; Malinauskas, Mangirdas

doi:10.1007/s11771-022-5153-z

Cited by 18 publications

(16 citation statements)

References 32 publications

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“…This unique transition is not allowed for the 1PA transition, the 2PA spectrum peak in terms of frequency is usually higher than half of that of the 1PA peak. The three-photon absorption process and other multiphoton absorption are also following similar rules [63,64]. Figure 3(b) illustrates that while the absorbed energy in the OPA process is linear with respect to UV light intensity I, 2PA follows a nonlinear relationship where the absorbed energy is proportional to the square of NIR light intensity I 2 .…”

Section: Tpp Technologymentioning

confidence: 82%

“…Alongside 2PA, other mechanisms, such as linear absorption, super-linear absorption, avalanche effects, and thermal accumulation, can also be harnessed in photopolymerization processes. These diverse mechanisms offer varied means to initiate and control the polymerization reaction, affording versatility in the design and fabrication of 3D structures [63,64]. Additionally, the scope of photopolymerization techniques has expanded beyond the use of solely NIR light, with visible (VIS) light oscillators being extensively utilized for 3D micro/nanolithography [64].…”

Section: Tpp Technologymentioning

confidence: 99%

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Two-photon polymerization-based 4D printing and its applications

Jian,

Li,

et al. 2023

Int. J. Extrem. Manuf.

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Two-Photon Polymerization (TPP) is a cutting-edge micro/nanoscale 3D printing technology based on the principle of two-photon absorption (TPA) to achieve subdiffraction limit feature sizes and capable of fabricating intricate 3D micro/nanostructures with exceptional resolution. 4D printing refers to fabricating structures using smart materials that can change shape, properties, or functionality to respond to external stimuli over time. Integrating TPP and 4D printing makes it possible to create responsive structures with micro/nanoscale precision, enhancing both technologies' capabilities and potential applications. This paper comprehensively reviews TPP-based 4D printing technology and its applications. First, the working principle of TPP and its recent development are introduced. Second, the optional 4D printing materials for TPP are discussed. Finally, this review paper presents several notable applications of TPP-based 4D printing-based, including biomedical microrobots, bioinspired microactuators, autonomous mobile microrobots, transformable devices, robots, and anti-counterfeiting microdevices. In conclusion, this paper also offers valuable insights into the current status and prospects of TPP-based 4D printing technology, which serves as a guide for researchers and practitioners.

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Section: Tpp Technologymentioning

confidence: 82%

Section: Tpp Technologymentioning

confidence: 99%

Two-photon polymerization-based 4D printing and its applications

Jian,

Li,

et al. 2023

Int. J. Extrem. Manuf.

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“…Materials. Pure SZ2080™ (IESL-FORTH, Greece) prepolymer without PI was chosen due to having excellent optical and mechanical properties for sub-100 𝜇m micro-prototyping and additive manufacturing applications [21]. SZ2080™ is a hybrid organically modified silicate, specifically designed for Multi-Photon Lithography (MPL) [22].…”

Section: Methodsmentioning

confidence: 99%

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Galvanauskas¹,

Astrauskyte²,

Balcas³

et al. 2023

Preprint

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Laser Direct Writing (LDW) allows for the fabrication of complex free-form structures, particularly advantageous in micro-optic applications when used in conjunction with high-performance polymers, such as SZ2080™. Nonetheless, high-complexity and integrated micro-optical elements often manifest multiple interfaces, resulting in increased Fresnel reflection losses. While conventional physical vapour deposition processes are usually employed in the manufacture of high-precision optics, such methods are incapable of producing uniform coatings on micrometer scale complex free-form structures. Atomic Layer Deposition (ALD) is an alternative highly flexible coating process, able to coat intricate geometries down to nano-scale. We propose the use of LDW in conjunction with ALD in the production of highly efficient anti-reflective (AR) coated functional free-form sub-100 μm micro-optic elements - multi-layer platforms and triplet objectives. Low-temperature deposition of aluminum oxide and titanium oxide AR coating proved to be compatible with SZ2080™ polymer structures, as no loss of optical function was observed. In addition, a substantial increase in transmittance, up to 99.9% per interface, is seen. Such findings prove suitable for use in highly efficient compound micro-lens arrays, greatly integrated solutions, and low-loss photonic components making them readily available for Photonic Integrated Circuits (PICs).

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“…However, the studies focused on material, photoinitiating systems, or some sole laser parameters, thus making it difficult to compare or extract the fundamental requirements for photopolymerization. Recently, it was demonstrated that a non‐photosensitized resin can be used and photopolymerization can be triggered by non‐amplified laser pulses, [ 268 ] where both are necessary requirements by conventional wisdom. [ 57 ] Moreover, current studies reveal that the laser wavelength is not of crucial importance for TPL as long as ultrafast pulses are used, thus enabling various confined photo‐excitation mechanism leading “toward perfect polymerization”.…”

Section: Fabrication Technologiesmentioning

confidence: 99%

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

Self Cite

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The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced three-dimensional printing techniques, two-photon polymerization lithography (TPL) uniquely offers a significant electron microscope (SEM) images of SMP structures before and after programming and after recovery, respectively. Reproduced under terms of the CC-BY license. [114] Copyright 2021, The Authors, published by Nature Publishing Group. b) Stiff SMPs for high-resolution reversible nanophotonics. I-II) The deformed and recovered nanopillars under optical microscope and SEM, respectively. Reproduced with permission. [115] Copyright 2022, American Chemical Society. c) Vapor-responsive photonic arrays. I-IV) Optical image of a grid array in air, in water vapors ~ 20 s, saturation with water vapors ~ 88s, and after the gas flow stopped, respectively.Reproduced under terms of the CC-BY license. [116] Copyright 2021, The Authors, published by Royal Society of Chemistry. d) SEM image of a 40-layer face-cantered-cubic photonic structure printed by SU-8. Reproduced with permission. [117] Copyright 2004, Nature Publishing Group. e) SEM image of helices with an axial pitch of 800 nm and a radius of 800 nm fabricated by the two-step absorption photoresist. Reproduced with permission. [118]

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Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator

Cited by 18 publications

References 32 publications

Two-photon polymerization-based 4D printing and its applications

Two-photon polymerization-based 4D printing and its applications

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

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