Features of the process of vacuum-arc produced Ti-plasma flux deposition under gas pressure of 1 to 10 Pa

Khoroshikh, V.M.; Leonov, S.A.; Белоус, В.А.

doi:10.1016/j.surfcoat.2014.11.039

Cited by 12 publications

(4 citation statements)

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“…A cylinder with an inner diameter of 600 mm and length of 700 mm was the vacuum chamber of the system. A vacuum-arc plasma source with magnetic stabilization of a cathode spot was used [27]. HS6-5-2 steel (PN EN ISO 4957; 2018-09 [28]) substrates, 32 mm in diameter and 3 mm thick with the chemical composition (wt.%): C-0.87, W-6.4, Mo-5.0, V-1.9, Cr-4.2, Mn-0.3, Si-0.4 and Fe (balance) were used.…”

Section: Coating Depositionmentioning

confidence: 99%

Mechanical Properties of V-O-N Coatings Synthesized by Cathodic Arc Evaporation

Warcholinski,

Gilewicz,

Kuprin

et al. 2024

Materials

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The V-O-N coating set was produced at different relative oxygen concentrations of O2(x) = O2/(N2 +O2) using cathodic arc evaporation. The aim of the research was to determine the effect of oxygen on coating properties. The coatings’ composition and structural properties (X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX)) and mechanical properties—hardness, adhesion, and wear resistance (nano-indenter, scratch tester, ball-on-disc tester)—were extensively investigated. EDX and XRD analyses indicate that in coatings formed with a relative oxygen concentration in the range of 20–30%, the oxygen concentration in the coating increases dramatically from approximately 16 at.%. to 63 at.%, and the nitrogen concentration drops from about 34 at.% up to 3 at.%. This may indicate greater activity of oxygen compared to nitrogen in forming compounds with vanadium. The occurrence of the V5O9 phase belonging to the Magnéli phases was observed. Microscopic observations indicate that the number of surface defects increases with the oxygen concentration in the coating. The opposite effect is characterized by mechanical properties—hardness, adhesion, and wear resistance decrease with increasing oxygen concentration in the coating.

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Section: Coating Depositionmentioning

confidence: 99%

Mechanical Properties of V-O-N Coatings Synthesized by Cathodic Arc Evaporation

Warcholinski,

Gilewicz,

Kuprin

et al. 2024

Materials

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“…The use of elevated nitrogen pressure during the deposition of TiN coatings not only reduces defects in the coatings due to the reduced number of macroparticles generated at the cathode, but also results in an increase in the deposition rate of these coatings in the range of nitrogen pressures from 2 to 10 Pa [34]. This may be due to a change in the spatial distribution of condensed particles in the coating deposition area.…”

Section: Fig 7 Relationship Between Cavitation Erosion Rate Of Coatin...mentioning

confidence: 99%

CAVITATION EROSION RESISTANCE OF VACUUM-ARC COATINGS BASED ON TiN

Klimenko,

Marinin,

Belous

et al. 2023

Problems of Atomic Science and Technology

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This review presents an examination of various studies investigating the impact of deposition process conditions and structural characteristics of TiN-based vacuum-arc coatings on their ability to withstand cavitation erosion in water. The structural and phase composition of TiN coatings is influenced by two key technological parameters: the nitrogen pressure in the vacuum chamber and the substrate bias potential. However, it has been observed that vacuum-arc alloy coatings such as TiSiN and TiAlYN exhibit notably lower resistance to cavitation erosion. Additionally, research on multilayer Ti-TiN coatings with varying numbers and thickness ratios of layers has not shown an improvement in resistance to cavitation wear when compared to single-layer coatings deposited under optimal conditions. On the other hand, single-phase stoichiometric TiN coatings deposited at a higher nitrogen pressure of 2 Pa and a bias potential of up to -300 V have demonstrated remarkable resistance to cavitation wear. These coatings could be effectively utilized to protect the titanium alloy Ti-6Al-4V against cavitation damage.

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“…Vacuum arc TiN coatings were deposited using the "Bulat" facility from the plasma source with magnetic cathode spot confinement and a focusing coil [10]. Pure titanium (99.9%) was used as cathode material.…”

Section: Experimental Techniquementioning

confidence: 99%

“…By the example of cathodes made from Ti, Zr, and Ti-Al alloys, which form high-melting nitrides, it has been found that the increasing nitrogen pressure in the deposition chamber to > 0.5 Pa leads to the sharp decrease of the number of macroparticles that is due to the formation a thin nitride layer on the cathode surface [8,9]. References [10][11][12] show a possibility of producing TiN, ZrN, and CrN coatings with a low content of macroparticles and high mechanical properties on the fixed substrates under nitrogen pressure of ≥ 2 Pa.…”

Section: Introductionmentioning

confidence: 99%