Feature-oriented scanning methodology for probe microscopy and nanotechnology

Abstract

A real-time scanning algorithm is suggested which uses features of the surface as reference points at relative movements. Generally defined hill-or pit-like topography elements are taken as the features. The operation of the algorithm is based upon local recognition of the features and their connection to each other. The permissible class of surfaces includes ordered, partially ordered, or disordered surfaces if their features have comparable extents in the scan plane. The method allows one to exclude the negative influence of thermodrift, creep, and hysteresis over the performance of a scanning probe microscope. Owing to the possibility of carrying out an unlimited number of averages, the precision of measurements can be considerably increased. The distinctive feature of the method is its ability of topography reconstruction when the ultimate details are smaller than those detectable by a conventional microscope scan. The suggested approach eliminates the restrictions on scan size. Nonlinearity, nonorthogonality, cross coupling of manipulators as well as the Abbé offset error are corrected with the use of scan-space-distributed calibration coefficients which are determined automatically in the course of measuring a standard surface by the given method. The ways of precise probe positioning by local surface features within the fine manipulator field and the coarse manipulator field, automatic probe return into the operational zone after sample dismounting, automatic determination of exact relative position of the probes in multiprobe instruments, as well as automatic successive application of the whole set of probes to the same object on the surface are proposed. The possibility of performing accurately localized low-noise spectroscopy is demonstrated. The developed methodology is applicable for any scanning probe devices.

Availability of Feature-Oriented Scanning Probe Microscopy for Remote-Controlled Measurements on Board a Space Laboratory or Planet Exploration Rover

“…Recently, Lapshin (2004Lapshin ( , 2007 suggested a featureoriented scanning (FOS) method that may help to solve a number of problems connected with the use of an SPM on board a spacecraft. FOS is a method intended for the highprecision measurement of surface micro-to nanotopography as well as other surface properties and characteristics by way of scanning probe microscopy, where surface features (objects) are used as reference points for the microscope probe.…”

“…Moreover, by means of a computer-controlled distributed calibration (Lapshin, 2004(Lapshin, , 2006, it is possible to correct, in one procedure, all spatial distortions caused by nonlinearity, nonorthogonality, and parasitic cross couplings of the X, Y, Z piezomanipulators of the microscope scanner.…”

“…The new performance capabilities of the FOS method are available as a result of the use of the following combination of techniques (Lapshin, 2004(Lapshin, , 2007: localization of the measurements, operation with separate surface features, movement by short distances from one feature to another located nearby, relative nature of the measurements and multiple measurement iterations, consecutive probe attachments to surface features, continuous monitoring of drift velocity, and use of hierarchically organized counter displacements of the probe.…”

Enhancement and recovery in atomic force microscopy images

“…This problem is even more pronounced when the sample has sharp gradients. Another problem is thermal drift, the tendency for the probe and sample to move relative to each other due to temperature variations in the probe, sample, and substrate [19]. Since an image is formed point-by-point, the topography data may be skewed or distorted.…”

Methods for Vertical Drift Measurements of Scanning Probe Microscopes

“…Two methods are now commonly used for measuring SPM drift in the lateral direction: the characteristic marker method 11,12 and the image correlation method. 13,14 The former allows the lateral drift, image rotation and magnification to be determined manually, with a resolution of one pixel.…”