Abstract:The Au/n-Ti 2 S/p-Si/Al heterojunction with intrinsic thin-layer solar cells were analyzed by AFORS-HET software program. Thickness of the emitter intrinsic layer and the interface state density of such cells were studied. In which, the intrinsic layer inserted between the Ti 2 S and crystalline p-type silicon substrate, reduce the interface state density. The thinner intrinsic layer is better than thicker one, when the interface state density is lower than 10 10 cm −2 .V −1 . As the thickness of the emitter increased, both short-current density (J) and the conversion efficiency were decreased. The dependence of J-V characteristics of the Au/n-Ti 2 S/p-Si/Al heterojunction solar cell on Front and back Surface Recombination Velocity (SRV) was studied. By optimizing the initial parameters set, the Au/n-Ti 2 S/p-Si/Al solar cell reaches a high efficiency (η) up to 21.849% (FF: 0.834, V oc : 0.666 V, J sc : 39.39 mA/cm 2 ).