Feasibility of micro power supplies for MEMS

Koeneman, Paul B.; Busch‐Vishniac, Ilene J.; Wood, Kristin L.

doi:10.1109/84.650133

Cited by 163 publications

(96 citation statements)

References 18 publications

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“…The layers' thicknesses were 0.5 lm for the p þ -region, 10 lm for the i-region, and 1 lm for the n þ -region. After growth, the wafer was processed to form mesa structures using 1:1:1 H 3 PO 4 Table I.…”

Section: Methodsmentioning

confidence: 99%

“…3 In many of these applications, nuclear microbatteries could be used to provide small amounts of power over long periods of time, and for this reason they have received considerable research attention. 4 Nuclear microbatteries work by converting nuclear energy to electrical energy and offer important characteristics such as high energy density, stability, and long life. The high-energy particles, released by radioactive atoms during nuclear decay, are absorbed by the microbattery conversion material generating electrical energy.…”

Section: Introduction a Nuclear Microbatteriesmentioning

confidence: 99%

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Gallium arsenide 55Fe X-ray-photovoltaic battery

Butera

Lioliou

Barnett

2016

Journal of Applied Physics

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The effects of temperature on the key parameters of a prototype GaAs 55Fe radioisotope X-ray microbattery were studied over the temperature range of −20 °C to 70 °C. A p-i-n GaAs structure was used to collect the photons from a 254 Bq 55Fe radioisotope X-ray source. Experimental results showed that the open circuit voltage and the short circuit current decreased with increased temperature. The maximum output power and the conversion efficiency of the device decreased at higher temperatures. For the reported microbattery, the highest maximum output power (1 pW, corresponding to 0.4 μW/Ci) was observed at −20 °C. A conversion efficiency of 9% was measured at −20 °C.

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Section: Methodsmentioning

confidence: 99%

Section: Introduction a Nuclear Microbatteriesmentioning

confidence: 99%

Gallium arsenide 55Fe X-ray-photovoltaic battery

Butera

Lioliou

Barnett

2016

Journal of Applied Physics

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“…Again R load can be used to optimize ζ e and the optimum value can be found from equation (13) and as stated previously, maximum power occurs when ζ e equals ζ p .…”

Section: Transduction Damping Coefficientsmentioning

confidence: 99%

“…Renewable power can be obtained by generating electrical energy from light, thermal and kinetic energy present within the sensor's environment. These sources can be used as either a direct replacement or to augment the battery, thereby increasing the lifetime and capability of the network [13][14][15][16] and mitigate the environmental impact caused by issues surrounding the disposal of batteries. In this context, solar power is probably the most well known.…”

Section: Introductionmentioning

confidence: 99%

Energy harvesting vibration sources for microsystems applications

Beeby

Tudor

White

2006

Meas. Sci. Technol.

2,603

1,468

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This paper reviews the state-of-the art in vibration energy harvesting for wireless, self-powered microsystems. Vibration-powered generators are typically, although not exclusively, inertial spring and mass systems. The characteristic equations for inertial-based generators are presented, along with the specific damping equations that relate to the three main transduction mechanisms employed to extract energy from the system. These transduction mechanisms are: piezoelectric, electromagnetic and electrostatic. Piezoelectric generators employ active materials that generate a charge when mechanically stressed. A comprehensive review of existing piezoelectric generators is presented, including impact coupled, resonant and human-based devices. Electromagnetic generators employ electromagnetic induction arising from the relative motion between a magnetic flux gradient and a conductor. Electromagnetic generators presented in the literature are reviewed including large scale discrete devices and wafer-scale integrated versions. Electrostatic generators utilize the relative movement between electrically isolated charged capacitor plates to generate energy. The work done against the electrostatic force between the plates provides the harvested energy. Electrostatic-based generators are reviewed under the classifications of in-plane overlap varying, in-plane gap closing and out-of-plane gap closing; the Coulomb force parametric generator and electret-based generators are also covered. The coupling factor of each transduction mechanism is discussed and all the devices presented in the literature are summarized in tables classified by transduction type; conclusions are drawn as to the suitability of the various techniques.

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“…Also, power packs based on combustion rather than electrochemistry could extend operating times of electronic devices by a factor of ten (Benson and Ponton, 1993). In the area of chemical processing, miniaturized chemical reactors could provide on-site neutralization of toxic chemicals thereby eliminating the need for transport and burial (Koeneman, et al, 1997). Because many MECS devices rely on fluidic processes, the same technology can be applied to biological applications.…”

Section: Introductionmentioning

confidence: 99%

Microchemical Systems and Their Applications Workshop Held on 16-18 June 1999 in Reston, Virginia

Jensen¹,

Fedkiw²,

Robert³

et al. 2000

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Public Reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comment regarding this burden estimates or any other aspect of this collection of information, including suggestions for reducing this burden, to Washington Headquarters Services, Directorate for information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and fy/Lo t+ooM. t-cH-CF SUPPLEMENTARY NOTESThe views, opinions and/or findings contained in this report are those of the author(s) and should not be construed as an official Department of the Army position, policy or decision, unless so designated by other documentation. This report summarizes presentations, discussions and conclusions from the Workshop, "Microchemical Systems and Their Applications," held June [16][17][18] 1999, in Fieston,Virginia USA. The objectives were to establish: (i) for which application areas microreactors would have potential, (ii) essential scientific problems that would have to be solved to realize particular devices, and (iii) the time scale for developing microreactor technologies. The workshop also reviewed fabrication techniques beyond standard silicon based MEMS processes and incorporating metals, polymer, and ceramics. The workshop participants reflected the multidisciplinary nature of microchemical system research and represented government, industry and university organizations. The format consisted of invited talks reviewing the state-of-the-art in microchemical systems, application needs, and relevant fabrication issues. These issues were further elaborated upon in a poster session. The presentations and posters were followed by three breakout sessions addressing specific objectives of the workshop, specifically (1) Opportunities for microenergy devices, (2) Challenges and needs in microfabrication and materials, and (3) Chemical applications of microchemical systems. Promising applications of microreaction technology were identified along with needs for microreaction technology research and development. The report contains of an executive summary, background information, summaries from the working group, and copies of presentations and posters. This report summarizes presentations, discussions and conclusions from the Workshop, "Microchemical Systems and Their Applications," held June [16][17][18] 1999, in Reston,Virginia USA. The objectives were to establish: (i) for which application areas microreactors would have potential, (ii) essential scientific problems that would have to be solved to realize particular devices, and (iii) the time scale for developing microreactor technologies. The workshop also reviewed fabrication techniques beyond standard silicon based MEMS processes and incorporating metals, polymer, and ceramics.The workshop participants reflected the multidisciplinary natu...

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Feasibility of micro power supplies for MEMS

Cited by 163 publications

References 18 publications

Gallium arsenide 55Fe X-ray-photovoltaic battery

Gallium arsenide 55Fe X-ray-photovoltaic battery

Energy harvesting vibration sources for microsystems applications

Microchemical Systems and Their Applications Workshop Held on 16-18 June 1999 in Reston, Virginia

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