FEA analysis and experimental investigation of building blocks for flexural mechanism

Patil, R.S; Deshmukh, Suhas; Reddy, Y. P.; Mate, Kavidas

doi:10.1109/icnte.2015.7029921

Cited by 4 publications

(4 citation statements)

References 11 publications

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“…The actuator's interface is a secondary guiding system that allows making this passive capillary gripper compatible with the existing positioning systems. It is made based on the concept of double parallelogram beams as studied by Patil et al [19]. A view of the vertical actuator will be shown in Section 4.…”

Section: Sequential Actuationmentioning

confidence: 99%

A Volume-Tuning Capillary Gripper That Enhances Handling Capabilities and Enables Testing of Micro-Components

2022

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Capillary forces are shown to be extremely effective for micro-assembly and pick-and-place processes, especially for their ability to self-align the handled objects. However, in today’s machines, micro-objects are submitted to high loads, such as compressions for the electrical testing of the micro-components, or inertial forces coming from the high accelerations of the machines. There, capillary grippers may show some limits. These issues, as well as the difficulty to perform precise visual inspections (due to the tilt of the handled micro-object that can occur after a perturbation, such as the displacement of the gripper), can all be solved by temporarily removing the liquid meniscus. Therefore, we present a novel volume-tuning capillary gripper that provides a solution to these limitations without adding additional significant complexities or changes to the existing pick-and-place machines. A multi-scale prototype was dimensioned and produced by using fast prototyping methods, such as a femtosecond laser-assisted chemical etching process for fused silica. Models bringing a deeper understanding of the subsystems are presented. The proof of concept was extensively tested. Its picking capabilities and enhancements of the handling capabilities during horizontal motions, as well as the repeatability of the tuning of the volume of liquid, are presented.

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Section: Sequential Actuationmentioning

confidence: 99%

A Volume-Tuning Capillary Gripper That Enhances Handling Capabilities and Enables Testing of Micro-Components

2022

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“…Comparison of different building blocks of flexural mechanism shows DFM offers better performance and is further experimentally validated. Also, FEA analysis of XY Flexural mechanism which uses DFM as building block is presented [10].…”

Section: International Journal Of Engineering Research and Technology (mentioning

confidence: 99%

Modeling and Design Analysis of XY Flexure Stage Mechanism

Bankar¹,

D²

2017

IJERT

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In micro-electro-mechanical system (MEMS) flexural mechanisms are commonly used because of their advantages such as frictionless and wear less motion and high precision. Flexures depend on material elasticity for their functionality. In flexure mechanism motion is generated due to elastic deformation of the beam from which it is made. One of the typical advantages of flexural mechanism is to gain precise deformation and flexibility to obtain motion in desired direction. This paper deals with Literature review of various paper based on XY stage mechanism. The XY positioning stage presented has monolithic structure and it is made from single piece of material with DFM.

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“…Flexure mechanisms are commonly used in micropositioning XY-stages due to their superior isolation of motion between the X-and Y-axis and their great difference between in-plane and outof-plane stiffness. There are many studies of double parallelogram flexure mechanisms (DPFM), which demonstrate extreme precision with mm-scale displacement range [9][10][11]. Figure 12 shows a simple model of double parallelogram flexure mechanism.…”

Section: Flexure Stage Designmentioning

confidence: 99%

In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

Yao

Duenner

Cullinan

2016

Journal of Micro and Nano-Manufacturing

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One of the major challenges in nanoscale manufacturing is defect control because it is difficult to measure nanoscale features in-line with the manufacturing process. Optical inspection typically is not an option at the nanoscale level due to the diffraction limit of light, and without inspection high scrap rates can occur. Therefore, this paper presents an atomic force microscopy (AFM)-based inspection system that can be rapidly implemented in-line with other nanomanufacturing processes. Atomic force microscopy is capable of producing very high resolution (subnanometer-scale) surface topology measurements and is widely utilized in scientific and industrial applications, but has not been implemented in-line with manufacturing systems, primarily because of the large setup time typically required to take an AFM measurement. This paper introduces the design of a mechanical wafer-alignment device to enable in-line AFM metrology in nanoscale manufacturing by dramatically reducing AFM metrology setup time. The device consists of three pins that exactly constrain the wafer and a nesting force applied by a flexure to keep the wafer in contact with the pins. Kinematic couplings precisely mate the device below a flexure stage containing an array of AFM microchips which are used to make nanoscale measurements on the surface of the semiconductor wafer. This passive alignment system reduces the wafer setup time to less than 1 min and produces a lateral positioning accuracy that is on the order of ∼1 μm.

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FEA analysis and experimental investigation of building blocks for flexural mechanism

Cited by 4 publications

References 11 publications

A Volume-Tuning Capillary Gripper That Enhances Handling Capabilities and Enables Testing of Micro-Components

A Volume-Tuning Capillary Gripper That Enhances Handling Capabilities and Enables Testing of Micro-Components

Modeling and Design Analysis of XY Flexure Stage Mechanism

In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

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