“…The development of compact, low cost, high-performance resonators is meant to respond to the growing demand of single-chip, highly integrated sensor (arrays) for (bio)chemical sensing applications, − and multiband radio frequency (RF) solutions for advanced wireless communication systems. − Micro- and nanoelectromechanical (MEMS/NEMS) resonators for sensor and RF applications have been widely explored because of their small size, light weight, low loss, and high IC integration capability. − Recently, the development of nanomaterials such as nanotubes, , nanowires, graphene, and other 2D nanomaterials, have opened new research interests in MEMS/NEMS resonator design and fabrications. In any case, micro/nano fabricated resonators are designed to work at appropriate frequency for specific applications.…”