Tuning the Resonant Frequency of Resonators Using Molecular Surface Self-assembly Approach

Liu, Wenpeng; Wang, Jingwei; Yu, Yifei; Chang, Ye; Tang, Ning; Qu, Hemi; Wang, Yanyan; Zhang, Hao; Zhang, Daihua; Xu, Huaping; Duan, Xuexin

doi:10.1021/am507640g

Cited by 23 publications

(24 citation statements)

References 43 publications

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“…More recently, Liu et al . [ 382 ] presented a new method to tune the resonant frequency of microfabricated film bulk acoustic resonator (FBAR) using molecular layer-by-layer (LbL) self-assembly approach for wireless broadband communication, as shown in Figure 35 . The maximum resonant frequency shift of FBAR reaches more than 20 MHz, meaning 1.4% tunability at least.…”

Section: Passive Frequency Tuning Methodsmentioning

confidence: 99%

“… Frequency tuning of microresonator using molecular LbL self-assembly approach reported by Liu et al . [ 382 ]. Optical microscope images of the FBAR filter ( a ) before and ( b ) after LbL assembly.…”

Section: Passive Frequency Tuning Methodsmentioning

confidence: 99%

Section: Passive Frequency Tuning Methodsmentioning

confidence: 99%

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Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

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Section: Passive Frequency Tuning Methodsmentioning

confidence: 99%

Section: Passive Frequency Tuning Methodsmentioning

confidence: 99%

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Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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“…Device Fabrication: In this work, film bulk acoustic resonators (FBARs) were fabricated using standard microfabrication according to a previous published process (see also Supporting Information) 40. The series resonant frequency signal of FBAR was obtained by network analyzer Device Functionalization: The aluminium nitride (AlN) substrates and FBAR sensors were oxidized in air plasma for 5 min to form hydrophilic interface with plasma cleaner.…”

mentioning

confidence: 99%

Detection of Volatile Organic Compounds Using Microfabricated Resonator Array Functionalized with Supramolecular Monolayers

Chang

Tang

et al. 2015

ACS Appl. Mater. Interfaces

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This paper describes the detection of volatile organic compounds (VOCs) using an e-nose type integrated microfabricated sensor array, in which each resonator is coated with different supramolecular monolayers: p-tert-butyl calix[8]arene (Calix[8]arene), 2,3,7,8,12,13,17,18-octaethyl-21H,23H-porphine (Porphyrin), β-cyclodextrin (β-CD), and cucurbit[8]uril (CB[8]). Supramolecular monolayers fabricated by Langmuir-Blodgett techniques work as specific sensing interface for different VOCs recognition which increase the sensor selectivity. Microfabricated ultrahigh working frequency film bulk acoustic resonator (FBAR) transducers (4.4 GHz) enable their high sensitivity toward monolayer gas sensing which facilitate the analyses of VOCs adsorption isotherms and kinetics. Two affinity constants (K1, K2) are obtained for each VOC, which indicate the gas molecule adsorption happen inside and outside of the supramolecular cavities. Additional kinetic information on adsorption and desorption rate constants (ka, kd) are obtained as well from exponential fitting results. The five parameters, one from the conventional frequency shift signals of mass transducers and the other four from the indirect analyses of monolayer adsorption behaviors, thus enrich the sensing matrix (Δf, K1, K2, ka, kd) which can be used as multiparameter fingerprint patterns for highly selective detection and discrimination of VOCs.

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“…The 4.44 GHz FBARs in this work (shown in Fig. S8 ) were conveniently fabricated by a standard MEMS fabrication process as described before 53 . In brief, an air cavity was initially generated on a single-side polished silicon wafer by deep reactive ion etching (DRIE).…”

Section: Methodsmentioning

confidence: 99%

Detection of Volatile Organic Compounds by Self-assembled Monolayer Coated Sensor Array with Concentration-independent Fingerprints

Chang

Tang

et al. 2016

Sci Rep

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In this paper, we have modeled and analyzed affinities and kinetics of volatile organic compounds (VOCs) adsorption (and desorption) on various surface chemical groups using multiple self-assembled monolayers (SAMs) functionalized film bulk acoustic resonator (FBAR) array. The high-frequency and micro-scale resonator provides improved sensitivity in the detections of VOCs at trace levels. With the study of affinities and kinetics, three concentration-independent intrinsic parameters (monolayer adsorption capacity, adsorption energy constant and desorption rate) of gas-surface interactions are obtained to contribute to a multi-parameter fingerprint library of VOC analytes. Effects of functional group’s properties on gas-surface interactions are also discussed. The proposed sensor array with concentration-independent fingerprint library shows potential as a portable electronic nose (e-nose) system for VOCs discrimination and gas-sensitive materials selections.

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Tuning the Resonant Frequency of Resonators Using Molecular Surface Self-assembly Approach

Cited by 23 publications

References 43 publications

Tunable Micro- and Nanomechanical Resonators

Tunable Micro- and Nanomechanical Resonators

Detection of Volatile Organic Compounds Using Microfabricated Resonator Array Functionalized with Supramolecular Monolayers

Detection of Volatile Organic Compounds by Self-assembled Monolayer Coated Sensor Array with Concentration-independent Fingerprints

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