Abstract:In this contribution we present a new algorithm for structured illumination microscopy with incoherent light. Existing algorithms for determining the contrast values of the focal depth response require a high accurate phase shift of the fringe pattern illumination. The presented algorithm, which is robust against inaccurate phase shift of the fringe pattern, reduces significantly the requirements for the phase shift and consequently the costs of the microscope. The new algorithm was tested by a preliminary exp… Show more
“…5,6 The possible depth of filed may be larger than 100 times the Rayleigh depth of field. 7 The traditional SIM system share all the common operations: projecting a patterned illumination on the sample, phase-shifting the pattern in accurate steps over the specimen, determining the contrast for all pixels, shifting the specimen in steps of z through focus, extracting the focal depth response (FDR) for all pixels and determining the focal position of each pixel to generate the topography of the specimen. The measurement system requires two PZT stages to achieve a high precise phase shifting and vertical scanning respectively.…”
Dimensional topography of micro-structure plays an important role in addressing quality issues and achieving a better performance of micro-fabricated products. Structured-illumination is an incoherent method to measure the micro-topography of smooth objects with nm height resolution. However, traditional phase shift algorithm (PSA) need at least three graphs for contrast evaluation of each scanning position and is not conducive to real-time measurement. In this paper, the principle of two-dimensional Fourier transform algorithm (FTA) for contrast evaluation has been proposed. With this method, only one pattern is required to determine the contrast value of a whole field. Both theory and experiments are conducted in detail to demonstrate that the FTA can greatly level up the efficiency and achieve an improved robustness in a complex measurement environment with the potential to be applied in online measurement.
“…5,6 The possible depth of filed may be larger than 100 times the Rayleigh depth of field. 7 The traditional SIM system share all the common operations: projecting a patterned illumination on the sample, phase-shifting the pattern in accurate steps over the specimen, determining the contrast for all pixels, shifting the specimen in steps of z through focus, extracting the focal depth response (FDR) for all pixels and determining the focal position of each pixel to generate the topography of the specimen. The measurement system requires two PZT stages to achieve a high precise phase shifting and vertical scanning respectively.…”
Dimensional topography of micro-structure plays an important role in addressing quality issues and achieving a better performance of micro-fabricated products. Structured-illumination is an incoherent method to measure the micro-topography of smooth objects with nm height resolution. However, traditional phase shift algorithm (PSA) need at least three graphs for contrast evaluation of each scanning position and is not conducive to real-time measurement. In this paper, the principle of two-dimensional Fourier transform algorithm (FTA) for contrast evaluation has been proposed. With this method, only one pattern is required to determine the contrast value of a whole field. Both theory and experiments are conducted in detail to demonstrate that the FTA can greatly level up the efficiency and achieve an improved robustness in a complex measurement environment with the potential to be applied in online measurement.
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