Microsphere-assisted microscopy serves as an effective super-resolution technique in biological observations and nanostructure detections, and optical trapping is widely used for the manipulation of small particles like microspheres. In this study, we focus on the selection of microsphere types for the combination of the optical trapping and the super-resolution microsphere-assisted microscopy, by considering the optical trapping performances and the super-resolution imaging ability of index-different microspheres in water simultaneously. Finally, the polystyrene (PS) sphere and the melamine formaldehyde (MF) sphere have been selected from four typical index-different microspheres normally used in microsphere-assisted microscopy. In experiments, the optically trapped PS/MF microsphere in water has been used to achieve super-resolution imaging of a 139 nm line-width silicon nanostructure grating under white light illumination. The image quality and the magnification factor are affected by the refractive index contrast between the microspheres and the immersion medium, and the difference of image quality is partly explained by the photonic nanojet. This work guides us in selecting proper microspheres, and also provides a label-free super-resolution imaging technique in many research fields.
In this research, an approach called modulation-based structured-illumination microscopy (MSIM) is proposed to measure the surface and thickness profile of thin film layers. With this method, a sinusoidal fringe pattern generated by digital micro-mirror devices (DMD) is projected on the sample. The modulation estimation of the reflected patterns is implemented for characterizing the surface and thickness profile of the sample. The measurement system is relatively simple and only an ordinary objective is enough to achieve imaging of the sample. In addition, the reflected signals come from the back surface of the film create less disturbance to the front surface compared with white-light interferometry. Consequently, they can be easily distinguished and achieve a successful measurement precisely. Both simulation and experiments are carried out to demonstrate the availability of this MISM method. The results are in excellent agreement with commercial stage profiler and the relative uncertainty is less than 10 nm.
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