Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

Xu, Fahu; Qiao, Deli; Xia, Changquan; Song, Xiumin; He, Yaojun

doi:10.3390/mi12111292

Cited by 4 publications

(2 citation statements)

References 29 publications

(33 reference statements)

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“… – 4 Depending on the scanning technique, LiDAR can be classified as a hybrid solid-state LiDAR, mechanical scanning LiDAR, or an all-solid-state LiDAR. Microelectromechanical system (MEMS) LiDAR, also commonly known as hybrid solid-state LiDAR, offers many advantages over traditional LiDAR technology with low cost, small size, and high integration of MEMS micromirrors as its core 5 , 6 . By doing so, it can effectively figure out the problems of large volumes and complex optical systems, providing a new solution for LiDAR applications.…”

Section: Introductionmentioning

confidence: 99%

Design of a circum-scanning light detection and ranging emission system

Zhou

et al. 2023

Opt. Eng.

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.The need for imaging and detecting in various instrument areas has brought light detection and ranging (LiDAR) to the forefront of consumer technology. Among different LiDAR, microelectromechanical system (MEMS) LiDAR has more appeal due to its small size and high integration. However, due to its low resolution and slight scanning angle, MEMS LiDAR does not apply to all scenes. Thus we presented a 360-deg scanning LiDAR emission optical system. Design formulas were deduced from theoretical formulas. In this system, the aspheric lens collimated the beam, MEMS micromirrors tracked the concentric circular beams, and the converging lens compensated for the divergence of the outgoing beam. By doing so, the target was scanned 360 deg at high resolution. With Zemax, the fast-axis divergence angle was 0.2484 mrad, the slow-axis divergence angle was 0.1546 mrad, and the system energy utilization rate was 84.16% with an angular resolution of 0.0142 deg at a distance of 10,000 mm. We have provided a potential solution for improving the scanning angle and resolution of MEMS LiDAR.

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Section: Introductionmentioning

confidence: 99%

Design of a circum-scanning light detection and ranging emission system

Zhou

et al. 2023

Opt. Eng.

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“…The capability to deflect an incident laser beam at high speed enables MEMS microactuators in laser projection displays [7][8][9][10]. Besides, the advantages of low-cost, better integrated circuit (IC) compatibility and high resolution provide MEMS microactuators with an opportunity in light detection and ranging (LiDAR) fields [11][12][13][14]. The current researchers are seeking for the performance improvement of MEMS microactuators to enable the various applications in micro/nanoscale fields [15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Design and Investigation of Dual-Axis Electrostatic Driving MEMS Scanning Micromirror

Wu,

Lin

2023

Preprint

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Micro-electro-mechanical systems (MEMS) are once proposed in 1970s and evolving rapidly. The current researchers are seeking for better designs and better applications of MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with a mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequencies of the slow and the fast axis are 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsional beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits.

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