Fast Simulation of Pattern Formation and Process Dependencies in Roller Nanoimprint Lithography

Taylor, Hayden

doi:10.1557/opl.2013.49

Cited by 2 publications

(2 citation statements)

References 10 publications

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“…[20][21][22][23] In literature, analytical and numerical models are presented to simulate the residual layer thickness in rollerbased imprint systems. 4,24,25 Moreover, when excluding the textures, roller-based imprinting shows a resemblance with forward roll coating and printing. 22,[26][27][28][29] These are well-known industrial methods to apply thin liquid coatings on flexible, foil-like substrates using rubber covered rollers.…”

Section: Introductionmentioning

confidence: 99%

Elastohydrodynamic lubrication of soft-layered rollers and tensioned webs in roll-to-plate nanoimprinting

Snieder

Dielen²,

Ostayen

2023

Proceedings of the Institution of Mechanical Engineers, Part J:

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This work presents the development of a numerical model for the elastohydrodynamic lubrication of roll-to-plate nanoimprinting with flexible stamps. Roll-to-plate nanoimprinting is a manufacturing method to replicate micro- and nanotextures on large-area substrates with ultraviolet-curable resins. The roller is equipped with a relatively soft elastomeric layer, which elastically deforms during the imprint process. The elastic deformation is described by linear elasticity theory. It is coupled to the pressure build-up in the liquid resin film, which is described by lubrication theory. The flexible stamp, which is treated as a tensioned web, is pre-tensioned around the roller. The elastic deformation of the tensioned web is described by the large-deflection bending of thin plates equations, considering its non-negligible bending stiffness. A Fischer–Burmeister complementarity condition captures the contact mechanics between the tensioned web and the roller. The governing equations combine in a coupled elastohydrodynamic lubrication model, which is fully described by a set of non-dimensional numbers. These are used in a parameter study to investigate the effect on the pressure and film height distributions. It is shown that the bending stiffness of the tensioned web results in an additional hydrodynamic pressure peak and corresponding minimum in the film height, near the inlet of the roller contact. An increase of the bending stiffness corresponds to a decrease in film height. The numerical results are compared with benchmarks from literature and experimentally validated with layer height measurements from flat layer imprints. Good agreement is found between the numerical and experimental results.

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Section: Introductionmentioning

confidence: 99%

Elastohydrodynamic lubrication of soft-layered rollers and tensioned webs in roll-to-plate nanoimprinting

Snieder

Dielen²,

Ostayen

2023

Proceedings of the Institution of Mechanical Engineers, Part J:

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“…The elastic deformation of the roller material is not taken into account. It is included by Taylor [ 26 ], who developed a contact mechanics-based model to simulate the RLT. The rollers in roller-based imprint systems are typically equipped with a relatively soft, elastomeric layer, which elastically deforms during the imprint process, due to the hydrodynamic pressure build-up in the resin film.…”

Section: Introductionmentioning

confidence: 99%

Simulating the Residual Layer Thickness in Roll-to-Plate Nanoimprinting with Tensioned Webs

Snieder

Dielen²,

Ostayen

2022

Micromachines

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Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a numerical model is developed to predict the residual layer thickness (RLT) as a function of the imprint parameters. The model is based on elastohydrodynamic lubrication (EHL) theory, which combines lubrication theory for the pressure build-up in the resin film, with linear elasticity theory for the elastic deformation of the roller material. The model is extended with inextensible cylindrical shell theory to capture the effect of the flexible stamp, which is treated as a tensioned web. The results show that an increase in the tension of the web increases the effective stiffness of the roller, resulting in a reduction in the RLT. The numerical results are validated with layer height measurements from flat layer imprints. It is shown that the simulated minimum layer height corresponds very well with the experimental results for a wide range of resin viscosities, imprint velocities, and imprint loads.

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Fast Simulation of Pattern Formation and Process Dependencies in Roller Nanoimprint Lithography

Cited by 2 publications

References 10 publications

Elastohydrodynamic lubrication of soft-layered rollers and tensioned webs in roll-to-plate nanoimprinting

Elastohydrodynamic lubrication of soft-layered rollers and tensioned webs in roll-to-plate nanoimprinting

Simulating the Residual Layer Thickness in Roll-to-Plate Nanoimprinting with Tensioned Webs

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