Fast response thermal linear motor with reduced power consumption

Paalvast, S.L.; Pham, H.T.M.; Sarrob, P.M.; Schmidt, R.H. Munnig

doi:10.1016/j.proche.2009.07.172

Cited by 5 publications

(5 citation statements)

References 3 publications

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“…For actuation, typically thermal or electrostatic comb-drive actuators are used. Thermal actuators generally suffer from long term drift due to constant power dissipation and are relatively slow [14]- [16]. Electrostatic comb-drive actuators in combination with flexure mechanisms can reach large strokes and only consume power when moving [17].…”

Section: Introductionmentioning

confidence: 99%

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Krijnen¹,

Swinkels²,

Brouwer

et al. 2015

J. Microelectromech. Syst.

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In this paper, we design, fabricate, and validate a large-stroke 3-degree-of-freedom (DOF) positioning stage with integrated displacement sensors for feedback control in a single-mask microelectromechanical systems (MEMS) fabrication process. Three equal shuttles exactly define the position of the stage in x, y, and R z . The kinematic relation between the shuttle positions and the stage position is given by the geometric transfer function. By increasing the order of this geometric transfer function, the stage error can be reduced. Each shuttle consists of a flexure mechanism, a position sensor, and electrostatic comb drive actuators for actuation along a straight line. The range of motion of the stage is limited by electrostatic pull-in of these comb drives. Three parameters of the stage, the leafspring length, the eccentricity, and the tangential arm, have been varied to find their influence on the stage range of motion. These simulation results can be used to design stages with different specifications. Position control of the individual shuttles is applied to control the position of the stage. The stroke of the 3DOF stage is verified up to 161 µm in x, 175 µm in y, and 325 mrad in R z . This exceeds the range of motion of existing stages. [2014-0314]

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Section: Introductionmentioning

confidence: 99%

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Krijnen¹,

Swinkels²,

Brouwer

et al. 2015

J. Microelectromech. Syst.

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“…Thermal or electrostatic actuators are typically used for the actuation of a stage in microelectromechanical systems (MEMS). The drawbacks of thermal actuators are the relatively large time constant, therefore the limited actuation bandwidth, and the relatively high power consumption [1][2][3]. Flexurebased designs are commonly used to increase the positioning repeatability due to the lack of friction, hysteresis and play [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Flexures for large stroke electrostatic actuation in MEMS

Krijnen

Brouwer

2013

J. Micromech. Microeng.

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The stroke of a microelectromechanical systems (MEMS) stage suspended by a flexure mechanism and actuated by electrostatic comb-drives is limited by pull-in. A method to analyze the electrostatic stability of a flexure mechanism and to optimize the stroke with respect to the footprint of flexure mechanisms is presented. Four flexure mechanisms for large stroke are investigated; the standard folded flexure, the slaved folded flexure, the tilted folded flexure and the Watt flexure. Given a certain stroke and load force, the flexures are optimized to have a minimum wafer footprint. From these optimizations it is concluded that the standard folded flexure mechanism is the best flexure mechanism for relatively small strokes (up to ±40 μm) and for larger strokes it is better to use the tilted folded flexure. Several optimized flexure mechanisms have been fabricated and experimentally tested to reach a stroke of ±100 μm. The displacement of the fabricated stages as a function of the actuation voltage could be predicted with 82% accuracy, limited by the fairly large tolerances of our fabrication process.

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“…10,11 Recently, electrothermal micro-actuators have been proposed and developed as an alternative solution for dual-stage micropositioning. 12,13 As compared to piezoelectric and electro-static micro-actuators, the silicon electrothermal micro-actuators are capable of generating a large force at a low driving voltage (<5 V) and adequately fast response (>1 kHz). [14][15][16] In addition, they have a high stiffness and consequently can achieve a high mechanical resonant frequency for precise positioning.…”

mentioning

confidence: 99%

Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

Lau

Yang

Thubthimthong

et al. 2012

Applied Physics Letters

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Recently, silicon electrothermal micro-actuators have been developed for dual-stage micropositioning in hard disk drive. But, silicon with a low coefficient of thermal expansion (CTE) has a shortcoming of requiring a large temperature change (>300 °C) to expand adequately. This letter presented a high-CTE polymer composite to solve the shortcoming of silicon. The polymer composite consists of high-aspect-ratio micro-machined SU-8 thermal expander and silicon thermal conductor. A micro-positioner which embodies the proposed polymer composite can drive a slider to travel fast (>1 kHz) more than a 17 nm-pitch data track under a moderate temperature rise (<100 °C).

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Fast response thermal linear motor with reduced power consumption

Cited by 5 publications

References 3 publications

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Flexures for large stroke electrostatic actuation in MEMS

Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite

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