In this work, we demonstrate the performance of a silicon-compatible,
high-performance, and self-powered photodetector. A wide detection
range from visible (405 nm) to near-infrared (1550 nm) light was enabled
by the vertical p–n heterojunction between the p-type antimony
telluride (Sb2Te3) thin film and the n-type
silicon (Si) substrates. A Sb2Te3 film with
a good crystal quality, low density of extended defects, proper stoichiometry,
p-type nature, and excellent uniformity across a 4 in. wafer was achieved
by atomic layer deposition at 80 °C using (Et3Si)2Te and SbCl3 as precursors. The processed photodetectors
have a low dark current (∼20 pA), a high responsivity of (∼4.3
A/W at 405 nm and ∼150 mA/W at 1550 nm), a peak detectivity
of ∼1.65 × 1014 Jones, and a quick rise time
of ∼98 μs under zero bias voltage. Density functional
theory calculations reveal a narrow, near-direct, type-II band gap
at the heterointerface that supports a strong built-in electric field
leading to efficient separation of the photogenerated carriers. The
devices have long-term air stability and efficient switching behavior
even at elevated temperatures. These high-performance and self-powered
p-Sb2Te3/n-Si heterojunction photodetectors
have immense potential to become reliable technological building blocks
for a plethora of innovative applications in next-generation optoelectronics,
silicon-photonics, chip-level sensing, and detection.