Fast gas concentration sensing by analyzing the rate of resistance change

Wu, Chau-Chung; Jiang, Guo-Jhen; Chiu, Cheng-Chung; Chong, Paul Joe; Jeng, Chien-Chung; Wu, Ren‐Jang; Chen, Jau Han

doi:10.1016/j.snb.2014.12.066

Cited by 38 publications

(23 citation statements)

References 30 publications

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“…The rate of change in resistance is dependent on the ozone concentration [21]. At higher gas concentrations, more ozone molecules were adsorbed on the film, and the film lost electrons rapidly.…”

Section: Resultsmentioning

confidence: 99%

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Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Jiang

Chang

et al. 2018

Sensors

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In this study, the sensing properties of an amorphous indium gallium zinc oxide (a-IGZO) thin film at ozone concentrations from 500 to 5 ppm were investigated. The a-IGZO thin film showed very good reproducibility and stability over three test cycles. The ozone concentration of 60–70 ppb also showed a good response. The resistance change (ΔR) and sensitivity (S) were linearly dependent on the ozone concentration. The response time (T90-res), recovery time (T90-rec), and time constant (τ) showed first-order exponential decay with increasing ozone concentration. The resistance–time curve shows that the maximum resistance change rate (dRg/dt) is proportional to the ozone concentration during the adsorption. The results also show that it is better to sense rapidly and stably at a low ozone concentration using a high light intensity. The ozone concentration can be derived from the resistance change, sensitivity, response time, time constant (τ), and first derivative function of resistance. However, the time of the first derivative function of resistance is shorter than other parameters. The results show that a-IGZO thin films and the first-order differentiation method are promising candidates for use as ozone sensors for practical applications.

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Section: Resultsmentioning

confidence: 99%

“…The ozone concentrations reported in this study were measured using the commercial ozone monitor. The details of the experimental schematics and processes have been reported in our previous study [11,12,20,21]. …”

Section: Methodsmentioning

confidence: 99%

Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Jiang

Chang

et al. 2018

Sensors

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“…The resistance of the IGZO films under different ozone concentrations (25 • C and relative humidity ∼21%) was measured. Details of the experimental procedure are given in our previous publication [11,22]. Table 1 Electrical behavior of IGZO gas sensors with different deposition temperatures (O3 ∼ 5 ppm).…”

Section: Methodsmentioning

confidence: 99%

“…3 and 4), which we compared with the resistance variation of a gas sensor by repeatedly injecting with ozone (5 ppm) at RT. The graphs show resistance versus time and the resistance rate (dR/dt is the rate of resistance change caused by the adsorption of ozone) [22]. R and dR/dt decrease with cycle number, which leads to poor repeatability.…”

Section: Resistancementioning

confidence: 99%

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Highly sensitive amorphous In–Ga–Zn–O films for ppb-level ozone sensing: Effects of deposition temperature

Jiang

Chang

et al. 2015

Sensors and Actuators B: Chemical

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Chemical Sensing with Atomically Thin Platinum Templated by a 2D Insulator

Kim

Rodner

et al. 2020

Adv Materials Inter

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Boosting the sensitivity of solid-state gas sensors by incorporating nanostructured materials as the active sensing element can be complicated by interfacial effects 1-4 . Interfaces at nanoparticles, grains, or contacts may result in non-linear current-voltage response, high electrical resistance, and ultimately, electric noise that limits the sensor read-out 5-8 . Here we report the possibility to prepare nominally one atom thin, electrically continuous metals, by straightforward physical vapor deposition on the carbon zero-layer grown epitaxially on silicon carbide. With platinum as the metal, its electrical conductivity is strongly modulated when interacting with chemical analytes, due to charges being transferred to/from Pt. This, together with the scalability of the material, allows us to microfabricate chemiresistor devices for electrical read-out of chemical species with sub part-per-billion detection limits. The two-dimensional system formed by atomically-thin metals open up a route for resilient and high sensitivity chemical detection, and could be the path for designing new heterogeneous catalysts with superior activity and selectivity.

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Fast gas concentration sensing by analyzing the rate of resistance change

Cited by 38 publications

References 30 publications

Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Highly sensitive amorphous In–Ga–Zn–O films for ppb-level ozone sensing: Effects of deposition temperature

Chemical Sensing with Atomically Thin Platinum Templated by a 2D Insulator

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