Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Wu, Chau-Chung; Jiang, Guo-Jhen; Chang, Kai-Wei; Deng, Zu-Yin; Yu-ning, Li; Chen, Kuen-Lin; Jeng, Chien-Chung

doi:10.3390/s18010163

Cited by 21 publications

(9 citation statements)

References 29 publications

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“…The sensing activities mainly involve the adsorption ability, catalytic activity, sensitivity, selectivity, thermodynamic stability, etc . An amorphous In–Ga–Zn–O thin film functioned as a stable and reproducible ozone gas sensor material to detect the ozone concentration from 500 to 5 ppm . The rate of resistance change and the maximum value of the first derivative of the resistance curve depend directly on the ozone concentration.…”

Section: Amos In Other Electrochemical Applicationsmentioning

confidence: 99%

Research Advances of Amorphous Metal Oxides in Electrochemical Energy Storage and Conversion

Yan

Abhilash

Tang

et al. 2018

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possess lower hardness, higher strength, higher elasticity, higher tensile strength, lower internal energy, higher interatomic forces, lower viscosity coefficient, larger surface area, higher chemical stability, and strong corrosion resistance compared with their crystalline counterparts. [1][2][3] Based on the anionic constituents, amorphous materials could be categorized as oxides, sulfides, phosphates, etc. Among them, amorphous metal oxide family is of great importance owing to its widespread applications in a variety of areas such as batteries, supercapacitors, electronics, conducting films, multilayered transistors, electrochromic displays, nonvolatile memories, and the like. [4][5][6] As the basic building blocks, metaloxide (M-O) polyhedra are responsible for the essential features of the electronic band structure in amorphous metal oxides (AMOs). [3] AMO materials differ from their crystalline counterparts in the arrangement of M-O polyhedra, in which a random network arrangement of distorted polyhedra with short-range ordering is presented rather than maintaining perfect periodicity. [7,8] The coordination number of the M-O polyhedra, namely, the number of anions bonded to the metal cation, constitutes a crucially decisive factor for the unique properties of AMOs. Multiple polyhedra are interconnected through different types of sharing configurations known as edge sharing, corner sharing, and face sharing of the oxygen atoms. The combination of different sharing geometries also affects the properties of AMOs. [9] In other words, AMOs are formed by the superposition of the distorted M-O polyhedra to form network arrays through a random package. Long-range structural disorder in the AMO reduces scattering mean free path, and the lack of grain boundaries makes the electronic properties identical within large areas. These unique characteristics make them suitable for flexible electronics such as flexible films, intervening layers, thin film transistors, etc. [10][11][12] In recent years, there are numerous reports pointing out the advantages of AMOs over the crystalline counterparts in many electrochemical applications. [13][14][15][16][17] For example, the inherent disorderliness in the structural arrangement and rich defects are evidenced to be highly constructive to improve the alkali ion diffusion through the lattice. [18,19] As for intercalation-type electrodes in lithium-ion batteries (LIBs), amorphous materials Amorphous metal oxides (AMOs) have aroused great enthusiasm across multiple energy areas over recent years due to their unique properties, such as the intrinsic isotropy, versatility in compositions, absence of grain boundaries, defect distribution, flexible nature, etc. Here, the materials engineering of AMOs is systematically reviewed in different electrochemical applications and recent advances in understanding and developing AMO-based high-performance electrodes are highlighted. Attention is focused on the important roles that AMOs play in various energy storage and conversion technologies...

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Section: Amos In Other Electrochemical Applicationsmentioning

confidence: 99%

Research Advances of Amorphous Metal Oxides in Electrochemical Energy Storage and Conversion

Yan

Abhilash

Tang

et al. 2018

Small

219

120

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“…Table summarizes the key parameters for a-IGZO-based gas sensors that are published in the literature. The response times of a-IGZO thin films typically exceed several minutes. − Traditional gas sensors require an external bias to provide activation energy for gas desorption on the surface, but the self-powered device operates at 0 V. This is a possible reason that the response and recovery time are relatively long in our case. It is difficult to provide a fair evaluation of device performance compared with those of state-of-the-art a-IGZO-based gas sensors because measurement systems, geometric electrodes, operating conditions, and working voltages are different.…”

Section: Resultsmentioning

confidence: 99%

Realization of a Self-Powered InGaZnO MSM Ozone Sensor via a Surface State Modulated Photovoltaic Effect

Huang

2022

ACS Appl. Electron. Mater.

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Traditional gas sensors require an external voltage to provide a readout signal for measuring the resistance/current changes. To reduce the power consumption and working area for system-on-chip applications, photovoltaic self-powered gas sensors are a promising strategy. However, most of the reported self-powered gas sensors are based on a vertical p−n junction structure with two different electrodes located on opposite sides, which is incompatible with planar circuit technology. In this study, a metal−semiconductor−metal (MSM) selfpowered ozone (O 3 ) gas sensor based on a-IGZO is successfully fabricated using localized ultraviolet treatment (UVT) which is used to selectively modify the surface states underneath different contacts. The established asymmetric Schottky barrier results in self-powered characteristics under UV illumination. The self-powered gas sensor exhibits an unbiased gas response of 74% with a response/ recovery time of 168/522 s toward 5 ppm of O 3 at room temperature. The proposed method provides insights for easy fabrication of photovoltaic self-powered gas sensors using a highly integrated MSM structure.

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“…The most common materials as sensing materials for impedimetric ozone gas sensors are zinc oxide, indium oxide, tungsten trioxide, and carbon nanotubes. For the sensing layer morphology, different nanostructures are utilised-such as nanocolumns [43], nanorods [26,45], platelets [46,48], nanothin films [44,59,64,[68][69][70], nanoparticles [51,54,58,60,66], nanoislands [52], nanosheets [61], nanotubes [62,63], nanowires [66], and thick films [53]. As substrate, silicon dioxide/silicon, aluminium oxide, glass, aluminium, and quartz and for electrodes platinum, gold, titanium, and copper are commonly employed.…”

Section: Impedimetric Sensorsmentioning

confidence: 99%

Recent Developments in Ozone Sensor Technology for Medical Applications

et al. 2020

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There is increasing interest in the utilisation of medical gases, such as ozone, for the treatment of herniated disks, peripheral artery diseases, and chronic wounds, and for dentistry. Currently, the in situ measurement of the dissolved ozone concentration during the medical procedures in human bodily liquids and tissues is not possible. Further research is necessary to enable the integration of ozone sensors in medical and bioanalytical devices. In the present review, we report selected recent developments in ozone sensor technology (2016–2020). The sensors are subdivided into ozone gas sensors and dissolved ozone sensors. The focus thereby lies upon amperometric and impedimetric as well as optical measurement methods. The progress made in various areas—such as measurement temperature, measurement range, response time, and recovery time—is presented. As inkjet-printing is a new promising technology for embedding sensors in medical and bioanalytical devices, the present review includes a brief overview of the current approaches of inkjet-printed ozone sensors.

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Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Cited by 21 publications

References 29 publications

Research Advances of Amorphous Metal Oxides in Electrochemical Energy Storage and Conversion

Research Advances of Amorphous Metal Oxides in Electrochemical Energy Storage and Conversion

Realization of a Self-Powered InGaZnO MSM Ozone Sensor via a Surface State Modulated Photovoltaic Effect

Recent Developments in Ozone Sensor Technology for Medical Applications

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