Fast fabrication of curved microlens array using DMD-based lithography

Zhang, Zhimin; Gao, Yiqing; Luo, Ningning; Zhong, Kangping

doi:10.1063/1.4941356

Cited by 13 publications

(3 citation statements)

References 14 publications

(12 reference statements)

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“…On the one hand, the preparation and integration of micro-optical components still depend on the processing capability of micro-nanoprocessing technology. Various methods, such as semiconductor lithography, [8] single-point diamond turning, [9] and ion-beam etching, [10,11] have been used to fabricate micro-optical components. However, the processing techniques mentioned above are usually only applicable to flat microstructures, which make it difficult to satisfy the demands of complex microstructure fabrication on curved surfaces.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Laser Fabrication of Refractive/Diffractive Micro‐Optical Components on Hard Brittle Materials

Tan

Wang

et al. 2023

Laser & Photonics Reviews

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Micro‐optical components exhibit significant potential applications in various fields such as imaging, optical fiber communication, and aerospace owing to their small size, light weight, and flexible design. It is imperative to fabricate micro‐optical components on hard brittle materials to improve stability and broaden the optical transmission range. Therefore, femtosecond laser processing technology is demonstrated to be an efficient processing strategy for preparing refractive/diffractive micro‐optical components on hard brittle materials compared to other established micromachining techniques. This study reviews recent advances in refractive/diffractive micro‐optical components using femtosecond laser processing technologies. The applications of refractive/diffractive micro‐optical components with high accuracy, efficiency, and quality in the fields of imaging, sensing, display, and integration are also summarized. Moreover, the challenges of femtosecond laser processing technologies and the outlook of micro‐optical components are highlighted.

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Section: Introductionmentioning

confidence: 99%

Femtosecond Laser Fabrication of Refractive/Diffractive Micro‐Optical Components on Hard Brittle Materials

Tan

Wang

et al. 2023

Laser & Photonics Reviews

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“…Several methods have been reported for fabrication of concave micromirrors, including the use of molds with concave spherical microlens arrays [1], photolithography [4], maskless lithography based on digital micromirror device [5], photolithography followed by ion implantation and electrochemical anodization [6].…”

Section: Introductionmentioning

confidence: 99%

Optical Phenomena and Processes Induced by Ultrashort Light Pulses in Chalcogenide and Chalcohalide Glassy Semiconductors

Blonskyi¹,

Kadan²,

Rybak³

et al. 2017

J. Nano- Electron. Phys.

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Time-resolved microscopy study of ablation with femtosecond laser pulses in chalcohalide glass and crystal silicon is presented. The laser pulse energy is deposited into the near-surface layer due to twophoton absorption. The superheated liquid is ejected from the ablation spot under the action of supersonic blast wave. Glass-forming process in chalcohalide glass creates optically smooth spherical surface of the crater due to the action of surface tension forces. As a result, single laser pulse produces microlens, which can be transformed into micromirrors after metal sputtering. The fabricated microoptical elements demonstrate diffraction-limited performance.

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“…Recently, maskless projection lithography technology based on digital micromirrors device (DMD) [13][14][15] has been regarded as a promising technique of microfabrication for its real-time, maskless, and cost-effective process [16,17]. For these advantages and its good ability in spatial light modulation, DMD-based maskless lithography has been developed to fabricate microstructures on curved substrate [18,19].…”

mentioning

confidence: 99%

Fabrication of seamless roller mould with smooth surface microstructures by rotation lithography and reflow process

Qiu

et al. 2018

Micro & Nano Letters

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In this work, the authors conducted a versatile approach for an innovative fabrication of a seamless micro-stripes array on the roller which is as a mould for roller imprinting lithography. The major steps in the proposed fabrication method include an uniform speed PR-coating process, followed by a digital micromirrors device based maskless lithography projection and an incremental step-and-rotate exposure process. In addition to above-mentioned steps, a following thermal reflow process was performed to transform the micro-stripes into smooth surface microstructures. The study also analysed the mechanism of the reflow process by numerical simulations and experiments. The mechanism includes the gravitational effect and the definition of the four stages of the reflow process. Study results show that the reflow process on the roller is feasible and the proposed method is a promising approach for fabricating three-dimensional smooth surface microstructures on the roller with different requirements.

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Fast fabrication of curved microlens array using DMD-based lithography

Cited by 13 publications

References 14 publications

Femtosecond Laser Fabrication of Refractive/Diffractive Micro‐Optical Components on Hard Brittle Materials

Femtosecond Laser Fabrication of Refractive/Diffractive Micro‐Optical Components on Hard Brittle Materials

Optical Phenomena and Processes Induced by Ultrashort Light Pulses in Chalcogenide and Chalcohalide Glassy Semiconductors

Fabrication of seamless roller mould with smooth surface microstructures by rotation lithography and reflow process

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