Photonic devices that can guide, transfer, or modulate light are highly desired in electronics and integrated silicon (Si) photonics. Here, we demonstrate for the first time, to the best of our knowledge, the creation of optical waveguides deep inside Si using femtosecond pulses at a central wavelength of 1.5 μm. To this end, we use 350 fs long, 2 μJ pulses with a repetition rate of 250 kHz from an Er-doped fiber laser, which we focused inside Si to create permanent modifications of the crystal. The position of the beam is accurately controlled with pump-probe imaging during fabrication. Waveguides that were 5.5 mm in length and 20 μm in diameter were created by scanning the focal position along the beam propagation axis. The fabricated waveguides were characterized with a continuous-wave laser operating at 1.5 μm. The refractive index change inside the waveguide was measured with optical shadowgraphy, yielding a value of 6 × 10 −4 , and by direct light coupling and far-field imaging, yielding a value of 3.5 × 10 −4 . The formation mechanism of the modification is discussed.

It is well known that today two main and well studied methods for alignment of liquid crystals has been used, namely: rubbing and photoalignment technologies, that lead to the change of anisotropic properties of aligning layers and long-range interaction of the liquid crystal molecules in a mesophase. In this manuscript, we use the nonlinear laser lithography technique, which was recently presented as a fast, relatively low-cost method for a large area micro and nanogrooves fabrication based on laser-induced periodic surface structuring, as a new perspective method of the alignment of nematic liquid crystals. 920 nm periodic grooves were formed on a Ti layer processed by means of the nonlinear laser lithography and studied as an aligning layer. Aligning properties of the periodic structures of Ti layers were examined by using a combined twist LC cell. In addition, the layer of the nanostructured Ti was coated with an oxidianiline-polyimide film with annealing of the polymer film followed without any further processing. The dependence of the twist angle of LC cells on a scanning speed and power of laser beam during processing of the Ti layer was studied. The azimuthal anchoring energy of Ti layers with a periodic nanostructure was calculated. The maximum azimuthal anchoring energy for the nanostructured Ti layer was about 4.6 × 10 −6 J/m 2 , which is comparable to the photoalignment technology. It was found that after the deposition of a polyimide film on the periodic nanostructured Ti layer, the gain effect of the azimuthal anchoring energy to~1 × 10 −4 J/m 2 is observed. Also, AFM study of aligning surfaces was carried out.

It is well known that the alignment of liquid crystals (LCs) can be realised by rubbing or photoalignment technologies. Recently, nonlinear laser lithography (NLL) was introduced as a fast, relatively low-cost method for large area nano-grating fabrication based on laser-induced periodic surface structuring. In this letter for the first time, the usage of the NLL as a perspective method of the alignment of nematics was presented. By NLL, nanogrooves with about 0.92 μm period were formed on Ti layer. The nanostructured Ti layer (NSTL) was coated with oxidianilinepolyimide film with annealing of the polymer followed without any further processing. Aligning properties of NSTLs were examined with combined twist LC cell. The dependencies of the twist angle of LC cells and azimuthal anchoring energy (AE) of layers on scanning speed and power of laser beam during processing of the Ti layer were the focus of our studies as well. The maximum azimuthal AE, obtained for pure NSTL, is comparable with photoalignment technology. It was found that the deposition of polyimide film on NSTL leads to the gain effect of the azimuthal AE. Also, atomic force microscopy (AFM) study of aligning surfaces was carried out.