Fast Embedded Characterization of FEOL Variations in MOS Devices

Rigaud, F.; Portal, Jean‐Michel; Dreux, Philippe; Vast, J.; Aziza, Hassen; Bas, G.

doi:10.1109/icmts.2009.4814642

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“…In this paper we discuss process monitors in the form of ring oscillators, to be seamlessly inserted into a synthesizable microprocessor design. Due to their inherent monitoring of process performance and their digital I/O nature, ring oscillators (ROs) have been heavily utilized for dedicated test chips designed for thorough process monitoring [2]- [3]. Recently, small sets of ROs have been directly embedded into CPUs so that local variability can be more accurately characterized within a CPU context [4]- [6].…”

Section: Introductionmentioning

confidence: 99%